42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm RS Q G Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

1

Standard Strokes Bore size [mm] Standard stroke [mm] *1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 *1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

Modular Type Lubricator Series AL

Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195 195 269 287 Metal bowl with drain cock B 85 124 166 200 200 274 292 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 53 Lubricator AL10 to

Process Pump Series PA3000/5000/PAX1000 Series PB1000

SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1. First mark the intersection point for a discharge rate of 4l/min and a lifting range of 15m. 2. Find the pilot air pressure for the marked point.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1. First mark the intersection point for a discharge rate of 4l/min and a lifting range of 15m. 2. Find the pilot air pressure for the marked point.

3 Position Cylinder Series RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

OMR0031

Green RESET Yellow HOLD COM BANK1 BANK2 Counter cable LATH3To be connected by the user. 80 - (5) How to operate When executing Step data No. 0 (Return to Origin Position), the RESET signal is output from the controller after the [Return to Origin Position] operation has been completed.

Process Pump

In general, 80 to 100 mesh (150 to 180 m) filters are recommended. When transferring a coagulable liquid, take measures to prevent it from coagulating in the pump. Flammable fluid cannot be used with the process pump with built-in solenoid valve (PB1011A). Do not use in an environment where flammable fumes are present or where flammable liquid may get stuck to the product.

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR ITV IC VBA VE VY1 G PPA AL Compatible with inlet supply pressure of 2.0 MPa Employs a handle shape for easy operation Compact type (face to face dimensions 35 mm, Ideal for discharge pressure adjustment on a overall length 80 mm) small

VXA21/22

0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

VXA21/22

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

High Power Cylinder:

REC Symbol Absorbed Energy/Cushioning Stroke RHC Bore size (mm) Max. absorbed energy (J) Effective cushioning stroke (mm) MTS REF 7 80 20 CC 12 80 25 21 80 32 33 80 40 OUT IN Theoretical Force (Unit: N) Piston area (mm2) Operating pressure (MPa) Operating direction Bore size (mm) Rod size (mm) 0.7 0.8 0.9 0.3 0.4 0.5 0.6 0.2 1.0 220 251 283 94.2 126 157 188 62.8 314 314 OUT 10 20 165 189

Ionizer Nozzle type IZN10 Series IZS

2.5 kVAC Energy saving static neutralization nozzle Within 10 V Offset voltage Note 2) Within 15 V High flow rate nozzle Ozone generation Note 3) 0.03 ppm (0.05 ppm for energy saving static neutralization nozzle) Fluid Air (Clean dry air) Operating pressure Note 4) Air purge 0.05 MPa to 0.7 MPa Note 5) Connecting tube size 6, 1/4 inch 24 VDC 10% Power supply voltage Current consumption 80