VCC

to 50 (C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA

AC Servo Motor Driver (SSCNET Type)

2.86 20 10 5 Parameter *1,*2 Para.

PFxx-OMS0001CN

min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 15 V420 mA () 1 k 5 24 V 600 12 V 300 50 6 0.4 V ()30 msec. 7 8 3/min)

AC Servo Motor Driver (Pulse input type/Positioning type)

end Reverse rotation stroke end (Note 5) LSP 6 LSN 7 10m max.

Soft Start-up Valve AV2000/3000/4000/5000 1

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Air Cylinder

50 is actuated at 300 mm/s.

IDX-OM-W038

D 5 3-4 IDH Series 52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A

VK3000

Port size (P, A and B port) Rated voltage M5 01 M5 x 0.8 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 8 R1, R2: M5 Option 24 VDC 12 VDC Nil None With bracket (Not assembled) 240 VAC, 50/60 Hz For other rated voltages, please consult with SMC. F Option Part No. Description Part no.

Title not found

1 0 lo 1 00 Double rcd o12,o16/5llj30 o20 to o40l5 to 50 o50, 06311 0 to 50 Standaid Double acting Slngle rcd o12. 01615 to 30 o2Oa /5lo50 o32. s4015 lo lOO o50 to o 100/10 to 100 Double rod o i 2 , o 1 6 1 5 t o 3 0 a2O, o25l5Io 50 a32,64015lo lOO o50 to 010C/10to 100 Singleacting Sp ng retum/extend o 1 2 I o s 4 \ l 5 , 1 Q aslt1O.20 @eooy options @Auto switcn See catal N320 for avaibble

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.

High Vacuum L Type Valve

Model XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient

LFE-OMY0008

100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

VNH

5 24 VDC 7 6 12 VDC 240 VAC 50/60 Hz 9 Option Other Option Component part no.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

AZ1000

to 150 psig (0.034 to 1.0 MPa) BP Material 5) Panel mounting hole: dia. 1.56 inch (39.6 mm).

CYP

Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.