Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Non-contact Gripper

: 100 Size: 120/150 300 200 120 Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] 250 100 160 ZP3 200 80 120/150 120 150 60 ZP3E 40/60/80 80 100 40 ZP2 40 50 20 ZP2V 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35

3 Port Air Operated Valve

(45) 22.5 VZA (50) VTA 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port VGA (Distance between ports) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

VNC

28 40 33 50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

1

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type (External absorber type) 11-12-2 7 SMC Actuators: Copper-free Air Grippers 6, 10, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 Cylinder bore size (mm) Air Grippers Series Application 6 10 12 16 20 25 32 40 50 63 80 100

CEx-OMQ0010

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

Clean Gas Filter

40 IN 0.1 MPa 19 1 22.5 13 0.7 MPa 65 0.001 0.5 MPa 0.0001 100 SFB302-02: TSJ 1/4 (Tube Swage Joint) 0.1 1 10 Flow rate L/min (ANR) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 TSJ 21.5 50 40 IN 19 1 13 22.5 69 SFB305-02, SFB315-02: URJ 1/4 (Union Ring Joint) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 URJ 21.5 50 40 IN 19 1 22.5 13 A Model A 79 84 SFB305-02 SFB315-02 308 Clean Gas Filter: Disposable

Copper-free Actuators

in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 Series/Variation Floating joint Series JA 5.2-2 SJAl JA Standard For compact cylinder SJBl 5.2-10 JB RB Shock absorber/ Series RB J 5.1-2 SRBl 20-RB O.D. thread M8/M10/M14/M20/M27 D 5.1-7 SRBLl 20-RBL O.D. thread M10/M14/M20/M27 -X 20Technical Data 5.5-5 6, 10, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 Copper-free

3

50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight Piping Length

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

IDX-OM-M051

Checks and Inspection Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

Series KV2 Fittings

40 41 68 57 111 121 172 100/800 100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

VK3000

Port size (P, A and B port) Rated voltage M5 01 M5 x 0.8 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 8 R1, R2: M5 Option 24 VDC 12 VDC Nil None With bracket (Not assembled) 240 VAC, 50/60 Hz For other rated voltages, please consult with SMC. F Option Part No. Description Part no.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80