OMR0031

Green RESET Yellow HOLD COM BANK1 BANK2 Counter cable LATH3To be connected by the user. 80 - (5) How to operate When executing Step data No. 0 (Return to Origin Position), the RESET signal is output from the controller after the [Return to Origin Position] operation has been completed.

Process Pump

In general, 80 to 100 mesh (150 to 180 m) filters are recommended. When transferring a coagulable liquid, take measures to prevent it from coagulating in the pump. Flammable fluid cannot be used with the process pump with built-in solenoid valve (PB1011A). Do not use in an environment where flammable fumes are present or where flammable liquid may get stuck to the product.

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX AMR ITV IC VBA VE VY1 G PPA AL Compatible with inlet supply pressure of 2.0 MPa Employs a handle shape for easy operation Compact type (face to face dimensions 35 mm, Ideal for discharge pressure adjustment on a overall length 80 mm) small

VXA21/22

0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

VXA21/22

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

High Power Cylinder:

REC Symbol Absorbed Energy/Cushioning Stroke RHC Bore size (mm) Max. absorbed energy (J) Effective cushioning stroke (mm) MTS REF 7 80 20 CC 12 80 25 21 80 32 33 80 40 OUT IN Theoretical Force (Unit: N) Piston area (mm2) Operating pressure (MPa) Operating direction Bore size (mm) Rod size (mm) 0.7 0.8 0.9 0.3 0.4 0.5 0.6 0.2 1.0 220 251 283 94.2 126 157 188 62.8 314 314 OUT 10 20 165 189

Ionizer Nozzle type IZN10 Series IZS

2.5 kVAC Energy saving static neutralization nozzle Within 10 V Offset voltage Note 2) Within 15 V High flow rate nozzle Ozone generation Note 3) 0.03 ppm (0.05 ppm for energy saving static neutralization nozzle) Fluid Air (Clean dry air) Operating pressure Note 4) Air purge 0.05 MPa to 0.7 MPa Note 5) Connecting tube size 6, 1/4 inch 24 VDC 10% Power supply voltage Current consumption 80

Stainless Steel Heat

Printed in Japan. 1st printing May, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

e-Rodless Actuator

TB Motor position TA Slot for auto switch 5.8 3.5 2 Power supply cable (2 wires) 80 160 + Stroke 20 3.4 (500) 60 2 x 4-square nut M3 x 0.5 Motor position DA Motor position DB T-slot section for mounting details Nominal size: 25 (A clearance of 40 or more is required.)

Short Stroke Electric Actuator Series LX

80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7 0.2 0.1 Refer to page 303 for acceleration time. 213

Series LX Acceleration Time Guide

80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.01 0.02 0.03 0.01 0.02 0.03 0.04 0 0 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw Specification (Vertical) Caution LXPB5BC/LXSH5BC LXPB2BC/LXSH2BC Transfer loads should not exceed each model's work load

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Short-circuit protection Yes 1% F.S

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

CNS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS Symbol CNA Cushion Yes Up to 250: , 251 to 1000: , 1001 to 1500: , 1501 to 1600: +1.0 0 +1.4 0 +1.8 0 +2.2 0 Stroke length tolerance CNS Basic style, Axial foot style, Rod side flange style, Center trunnion style, Single clevis style, Double clevis

Soft Start-up Valve

IP65 DIN terminal only Power consumption: 0.35 W * At 12/24 VDC Current model: 1.8 W (80% reduction) Improved flow rate characteristics: Up to 2.3 times C[dm3/(sbar)]: 9.2 * For AV2000-A Energy saving No air flow when the main valve is switched.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

no load) Current consumption NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Short-circuit protection Yes 1% F.S

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

NPN or PNP open collector 1 output Switch output Main circuit Main circuit Load 12 to 24 VDC Maximum load current 80 mA + Black OUT Maximum applied voltage 30 V (at NPN output) Residual voltage 1 V or less (with load current of 80 mA) Response time Anti-chattering function 1 s (0.25, 0.5, 2, 3) Blue DC () PNP open collector Max. 80 mA Residual voltage 1 V or less Short-circuit protection

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse