3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

VQ

/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

11.5 11 4 CRBU2WU30-S 0 0.043 0.005 0.014 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 8 16 2 22 50 47.5 29 17.5 12 1 12 13 4.5 98 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type Dimensions: 10, 15, 20, 30 (With angle adjuster) Double vane type CRBU2WU10-D CRBU2WU15, 20, 30-D Figures below show size 20 actuators.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock

04-mis-e

-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS-A0804

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-20-031 1 pc. VV3ZA4-20-0311 pc. VZA212-P-M52 pcs. VZA412-P-012 pcs. VVZ200-32A-11 pc. VVZ400-32A-11 pc. Caution Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs.

IR1000/2000/3000

20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

Stopper Cylinder Adjustable Mounting Height Type Series RSG

A 47 58 B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 Bore size (mm) 40 50 20 Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Basic type/Flange mounting These drawings (2 items) show the piston rod extended. Direction of work piece conveyance RSG-L Bore size: 40, 50 (98 + Stroke) Stroke 20 A 4-9 through 110 + Stroke 177 + 2 Strokes 67 + Stroke Approx.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

VCC

VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31 0.5 to 2 0.5 to 2 10 10 20 G1/4 OUT port 0.5 to 2 0.5 to 2 20 G1/4 OUT port n-1 9 7 5 3 1 122.2 <124.2> 142.2 <144.2> 142.2 <144.2> 120 122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9

VK300

[Option] Electrical entry D: DIN terminal DO : DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) Rated voltage Valve option Rated voltage Nil V Y W E DC AC CE-compliant 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz For the connector part number, refer to page

Electric Slide Table / High Precision Type 《 AC servo motor 》

385 Max. speed[mm/s] 400 200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw

VQ5000

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.