EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

SMC Electronic Switch Series Variations

1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions/ISE2l01 T1 01 T1 01 T1 Grommet style/ISE2l-15 Connector style/ISE2l-15C trimmer Pressure setting trimmer Pressure setting Indicator light Indicator light PSE ZSE4 ISE4 15 Lead wire length 600 15 (3000) L H 20 20 ZSE5 ISE5 Lead wire length 600 ZSE6 ISE6 ZSE3 ISE3 (3000) GS 9.5 PS

HRS100/150

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Electrical Wiring Warning Caution HRS HRS150-A/W-20 Grounding should never be connected to a water line, gas line or lightning rod. HRS 090 4 h HRS 100/150 HRS 100/150 2 h Caution 1 h HRSH 090 4 min 6 min 10 min 14 min 20 min 30 min 1.

A

M5) NAN110-N01 (1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Process Pump

30 40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

Hydraulic Cylinders

Mounting Heights for Stroke End Detection 20 & 25 Proper auto switch mounting positions (mm) B D-F9 D-F9V D-F9W D-F9WV D-A9 D-A9V D-A9 D-F9 D-F9W D-F9BAL Bore size (mm) SMC D-A90 B 15 16 A 12 13 B 19 20 A 11 12 B 18 19 A 8 9 SMC D-A90 20 25 A Approx.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

SFOD-OMT0005CN

No.SFOD-OMT0005CN-C EtherNet/IP (DC24V) / / JXC91 1 . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 (1) . 9 (2) . 9 (3) . 9 (4)PLC . 9 (5) . 9 (6) . 10 (7) . 10 (8) () . 11 (9) . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 (1)(JXC917-) . 14 (2)DIN (JXC918-) . 15 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 (IP ) . 18 4.2 . 19 TMEtherNet/IP TM . 20 4.3 RSLogix5000 4.4 EtherNet/

Series KV2 Fittings

20 13 20 34 65 30 28 37 63 32 41 65 70 64 80 132 116 150 100/800 100/800 100/800 100/600 100/400 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/200 100/100 100/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation. 6 Series KV2 90 Female Elbow KV2LF_ _-_ _ L1 Applicable Tube M D1 D2 L2 Hex Thread

Suction cups with flange

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Wedge Cam Operation Provides

20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

MTS

12) Stroke: Up to 20 stroke 0.1 0.1 D-X 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 200.03 0.03 Data 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 4 12 Gasket 4 12 Gasket 4 Parts included 13 O-ring 4 13 O-ring 4 13 O-ring 4 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 < External shock absorber type > Description Size 10 20 30 50 P523010-6 P523020-6 P523030-6 P523040-6

MXW

MX 10 MTS Width across flats 13 MY CY 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.030 depth 5.5 0 depth 5.5 6H9 +0.030 MG 7 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D72 98 48 -X 20(Y) (Y) 25 160 40 40 40 L Data 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread

CE

20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !