VZS

For details, refer to pages 3-7-19 and 3-7-20.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

L3 394 432 413 451 470 ( ) L4 14.5 14 17.5 17 14 (L4) L3 G: Approx. 300 H: Approx. 600 lead wire length ( ) 2n1-Rc(PT) 1/4 (ports A,B) 73.7 <74.4> [75.3] 52.8 39.8 19 39.4 38.1 (5.4) A B A B A B B B B 1 P 28 28 1 R 20 35 60.7 <64.1> [62.3] 39.8 A A A DIN rail 43.1 51 [Rc(PT) 1/4 port] P = 19 22 32.5 (Voltage rating indication) (5.25) L2 (DIN rail mounting hole pitch 12.5) L1 2n2-One-touch

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

(Mounting holes) 3.2 22-M3 0.5 (Pilot port) 22 3 49 2.5 (Mounting holes) 3.2 2A B 1.5 18.5 11 17.5 Manual override (Non-locking) A B 1.5 33 16 18.9 18.5 21 13.5 54.5 15 Manual override (Non-locking) 21.6 54.5 28.5 21 R2 P P1 1(Bleed port) 2P R 13 11 0.5 10 5 10 10 1(Bleed port) 25-M5 0.8 (Piping port) 7 7 14 28 5-M3 0.5 (Piping port) 19 19 Q Q Series SYJ3000 Power Conserving Type Q

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE 5 R1 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE R1 5 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

ZR

. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX is to be used alone and cannot be combined with other units.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

Basic Type/Direct Mount Type

numbers 15 through 19.

CJP

11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

SMC

P Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 26.3 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic style. 135 MXS Air slide table 1322Dimensions: MXS6L / Symmetric type 1322ZZ Z 0.5 19

NCA1

Please See Below for How to Order Piston Rod Assembly 19 Wear Ring Resin Available only as an Assembled Item. Please See Below for How to Order Piston Rod Assembly JM-10 JM-045 JM-045 JM-10 20 Jam Nut Carbon steel * Components included in a seal kit.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

RSQ

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 10-8-18 19 19 Stopper Cylinder: Adjustable Mounting Height Series RSG Rod End Configuration: Chamfered Type (Non-rotating piston rod) Basic style: Flange mounting These 2 figures show the piston rod extended.

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2

Intrinsically Safe Valve

connector with cover (LL) 53-SS5Y7-20Terminal type (TT) 53-SS5Y7-20Stations Stations 204.2 191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19

HRX-OM-M090

Table 5.16-19 List of set value Set value Explanation Initial value (Default setting) Setting/checking are not available if the setting of the electric resistivity/conductivity option is OFF. This alarm signal is not detected. Operation continues when this alarm signal is generated.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting