Enclosure: W (IP67), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 4 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)
Enclosure: W (IP67), SI Unit: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 4 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)
Type of Connector: PH (Flat Cable Connector 10), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)
Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)
High Vacuum Angle Valve Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).
Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.
Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected
SI Unit: VW (MITSUBISHI CC-LINK), Stations: 8 Stations, Port Location: U (U Side 2~10 Stations), SUP/EXH Block: Internal Pilot, A, B Port: C10 (ø10 One-touch Fitting)
SI Unit: VW (MITSUBISHI CC-LINK), Stations: 6 Stations, Port Location: B (Both Sides 2~16 Stations), SUP/EXH Block: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)
SI Unit: MITSUBISHI CC-LINK, Stations: 8 Stations, Port Location: U Side 2~10 Stations, SUP/EXH Block: Internal Pilot, A, B Port: ø10 One-touch Fitting
SI Unit: MITSUBISHI CC-LINK, Stations: 6 Stations, Port Location: Both Sides 2~16 Stations, SUP/EXH Block: Internal Pilot, A, B Port: ø8 One-touch Fitting
1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.