MXH Series Compact Slide

7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 Stroke (mm) LT NS LA LB J 5 14 49 4 10 10 49 14 10 4 15 24 59 4 20 20 59 24 20 4 25 30 69 4 30 30 69 30 30 4 40 45 20 79 6 20 50 89 55 25 25 6 60 60 30 99 6 30 34 Compact Slide MXH Series Dimensions 16 LT (mm) 8 24 16 LA LB 14 J-M4

RHC

20 27 27.5 24.5 72 62 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85

3 Position Cylinder Series RZQ

20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up to

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

Series AP500

psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12

1

14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30

EXxx-OMN0035CN

(EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40

2–4

20UNC M5 x 0.8 35.5 22.5 45.5 32.5 40 38 5.5 5 52 50.5 Bore size (mm) KB L M N OB Q RA RB T V W KA 12 16 20 25 10 7.1 3.5 15.5 3.5 6.5 7.5 7 4 0.5 14.9 6 14 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA MU Contact protection circuit None DD-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

10

For with cap Applicable absorber B C h1 h2 MM d f h M6 x 0.75 MM B 2 C 8 For basic type RBC08S RBC10S RBC14S RBC20S RBC27S RJ06J RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S RJ08 12 13.9 6.5 23 M8 x 1.0 9 15 9.2 RJ10 M8 x 1.0 14 16.2 8 23 M10 x 1.0 11 15 4 12 13.9 RJ14 M10 x 1.0 19 21.9 11 31 M14 x 1.5 15 20 4 14 16.2 M14 x 1.5 RJ2015 27 31.2 16 40 M20 x 1.5 23 25 6 19 21.9

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

RZQ

20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 32 18 36 10 A + Full stroke 40 18 36 10 50 22 44 14 63 44 22 14 10-10-11 12 Series RZQ Proper Auto Switch Mounting Position (For Detection of Piston A Stop Position) and Its Mounting Height D-A7 D-A80 U

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Precision Cylinder Series MTS

3.5 13 0.2 10 0.2 3.3H7 +0.012 0 6h7 0 0.012 20 0.2 28 20 0.2 27 39.5 18 17 77.5 + Stroke 15 M3 x 0.5 92.5 + Stroke 10 0.2 4-M4 x 0.7, effective length 6 19 14 0.2 Rod end male threads 6h7 0 0.012 Width across flats 5 Width across flats 5 Width across flats 5 M4 x 0.7 M4 x 0.7 5.8 8.1 8 8 8 2.4 7 9.5 9.5 9.5 4.5 4.5 4.5 29 29 29 Stud bolt part number: MT-S12 Stud bolt part number: MT-S12

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B