Manifold Type: 41 (Base Mounted), Valve Stations: 8 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 12 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 7 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 15 Stations, A, B Port: M5T (10-32 Nom)
Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5T (10-32 Nom), CE Marked: Q (CE Marked)
Manifold Type: 41 (Base Mounted), Valve Stations: 3 Stations, A, B Port: M5T (10-32 Nom), CE Marked: Q (CE Marked)
Manifold Type: 41 (Base Mounted), Valve Stations: 17 Stations, A, B Port: M5T (10-32 Nom)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: M5T (M5X0.8 NPTF)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M5T (M5X0.8 NPTF)
Vacuum System Peripherals: For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.
20 50 28 17 17 13 M10 x 1.5 20 35 22 M16 x 1.5 30 26 3/8 43 18 112 63 8 28 80 60 16 27 21 22.4 55 30 17 17 13 M10 x 1.5 22 40 25 M18 x 1.5 30 26 3/8 47 20 116 80 8 32 100 75 18 31 26 28 65 32 22 20 15 M12 x 1.75 26 45 29 M22 x 1.5 35 30 1/2 57 22 127 100 6.5 38 118 90 20 35 34 35.5 80 35 27 19 16 M12 x 1.75 27 50 34 M27 x 2 35 32 1/2 66 24 137 125 6.5 38 140 112 22 41 34 35.5 80 35 27 19
KKA4P-02F Rc 1/4 43.4 36.1 17 -03F 1/4 Rc 3/8 6.9 26.4 18.9 44.4 40.2 19 -04F Rc 1/2 48.6 69.7 T KKA6P-03F Rc 3/8 48.7 84.1 24 -04F 1/2 Rc 1/2 10.0 54.2 20.4 52.9 79.7 -06F Rc 3/4 30 54.6 123.8 KKA7P-04F Rc 1/2 67.7 217.1 32 -06F 3/4 Rc 3/4 13.5 99.6 27.6 69.4 196.8 L2 H -10F Rc 1 72.4 325.9 L1 KKA8P-06F Rc 3/4 41 82.0 420.5 -10F 1 Rc 1 17.5 168.3 35.6 85.0 391.3 -12F Rc 1 1/4 50 87.3 552.8
MXW Series Q Q Q Product Features .pages 134-135 Q Q MXW Series Q How to Order .page 136 Q Specifications.pages 137-139 Q Operation Guide .pages 140-141 Q Table Deflection .page 142 Q Construction/ Parts List, Seal Kits .page 143 Q Dimensional Drawings.pages 144-153 Q Auto Switch Specifications and Mounting .pages 154-155 Q Please see safety instructions on page 19
Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated
The method for measuring the settling time can be selected from the separate axis setting. 1ms 19 Overshoot amount The overshoot amount for position control is displayed in encoder pulses.
Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated
L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.
17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc 8 1/8 KQ2E08-01G M16 x 1 17 19 24.1 6.7 13 17 14.2 26.1 18 6 30.5 1/4 KQ2E08-02G M16 x 1 17 19 28.4 11 13 17 14.2 26.1 18 6 33.1 3/8 KQ2E08-03G M16 x 1 19 19 31.7 14.3 13 17 14.2 26.1 18 6 37.4 L1 M L2 10 1/4 KQ2E10-02G M20 x 1 22 24 29.3 9.9 15.6 21 15.6 41.5 29.5 7.5 63.8 3/8 KQ2E10-03G M20 x 1 22 24 31.4 12 15.6