Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

VEX1

2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

Round Type Hydraulic Cylinder

NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Compressed Air Preparation Filter

A B C D E Applicable model Y200-D 3.2 35 13.2 42 0.6 AFF/AM/AMD/AMK20 Y300-D 4.2 43 16.2 53 AFF/AM/AMD/AMK30 Y400-D 5.2 51 19.2 71 AFF/AM/AMD/AMK40 Y600T-D 6.2 140 60 115 50 70 20 11 31.2 8 70 AFF/AM/AMD/AMK50 AFF/AM/AMD/AMK60 27 Y600-D 6.2 64 27.2 90 AFF/AM/AMD/AMK50 AFF/AM/AMD/AMK60 International Standard ISO 8573-1:2010 Compressed Air Purity Classes Compressed air is used in a variety

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VQ110-L-M5 36.6 30.2 Manual override 4.9 4.9 12.4 15 E 22.7(Mounting hole) 2.5 12 17 About 300 (In case of latching) (Lead wire length) About 300 (Lead wire length) Lead wire color : Red Lead wire color : Black In case of latching type In case of locking knob type 42 40.7 35.6 11 SMC VQ110 -*L 30.7 JAPAN (4.1) (5.9) 5 (5.9) 5 5 A P 7 3 M5 (M3) 8.5 4.9 4.9 30.2 36.6 ( ) : In case of M3 Dimensions

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Display item), Set value (Threshold value) Sub screen Set value (Threshold value) Hysteresis value Visualization of settings Peak value Bottom value Delay time Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ1/TSJ2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 p. 9 ZSE20A(F)/ ISE20A 2 outputs Analog output (Voltage/Current) IP40 p. 11

Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

EXxx-OMU0020CN

(M12 ) (EX245-DX1EX245-DY1) IP65 0.2Nm EX9-AWTS M12 10 . 10-4 (EX9-AWTS) 66 No.EX-OMU0020CN 11. 11.1. . 11-1 . 11-1 Length the EX245 series module n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6 (8 ) mm 67 No.EX-OMU0020CN 12. 12.1.

IDU/IDF

15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D

Round Type Low Pressure Hydraulic Cylinder Series CH
M

LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

Ionizer

Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114