Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Porting: 3 (Top Ported), Seal: 1 (Metal), Pilot Specification: R (External Pilot), Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: T (w/Power Saving Circuit, Continuous Duty Type), Voltage: 5 (24VDC), Light/Surge Suppressor/Common Specification: NZ (w/Light Surge Voltage Suppressor, Negative Common), Manual Override: Non-locking Push Type, A,B Port Size: C8

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Series: SY5, Actuation: 3 Position Closed Center, Mounting/Porting: Top Ported, Seal: Metal, Pilot Specification: External Pilot, Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: w/Power Saving Circuit, Continuous Duty Type, Voltage: 24VDC, Light/Surge Suppressor/Common Specification: w/Light Surge Voltage Suppressor, Negative Common, Manual Override: Non-locking

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

VQ4000

Note 1) Note 2) Note 3) 2-5-19 Base Mounted 20 Series VQ4000 Kit (Lead wire cable) L 2-Rc 1/8 (Pilot EXH port) 38 70 18 18 2-G 3/4 (Electrical entry) 17.5 PE 30 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 42 Rc 1/4: Rc 1/4 thread R2 R1 5 P 1 3 Rc 3/8: Rc 3/8 thread SMC C8: One-touch fitting for 8 6-Rc 1/2 1(P), 5(R1), 3(R2) port C10: One-touch fitting for 1 C12: One-touch fitting for 12

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Fieldbus System

, N9: 3(R) port C8: 8 One-touch fitting N9: 5/16" One-touch fitting 4 1 2 3 5 6 7 8 n U side Station D side 30 8 11.5 DIN rail clamping screw 56.6 (12) 60 33.6 17.5 6.5 9.6 8.5 17.2 (7.5) C8, N9: 1(P) port C8: 8 One-touch fitting N9: 5/16" One-touch fitting 2n x C2, C3, C4, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch

Series VQ Base Mounted Metal Seal/Rubber Seal

(Series VQ2000) Porting specifications Applicable stations Port size Port location A, B P, R Series Side Side Max. 24 Max. 20 C3, C4, C6, M5 C4, C6, C8 C8 C10 VQ1000 VQ2000 Terminal Block Connection Open the terminal block cover for wire connection. Sequence 1.

42

How to Order [Option] VV5Q 08 C8 1 4 F U1 CE-compliant Nil Q CE-compliant Note) CE-compliant: For DC only.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(8 Onetouch fitting) Rc(PT)1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size A, B port Rc(PT)1/8 Rc(PT)1/8: 11 (0.6) C6: 8.6 (0.48) C8: 9.9 (0.55) Body ported SYJ7l2l __ __ __ (1) Valve effective area mm2(Cv) Base mounted SYJ7l4l __ 11.9 (0.66) 9.5 (0.53) C6: 8.5 (0.47) C8: 9.7 (0.54) __ Note 1) Value for a single solenoid 2 position valve mounted on the manifold.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 130 58 24.4 9 9 R3 SY A 2 4 18 13 SMC SMC 4 Cover diameter 1.6 Cross section 0.34mm2 B SYJ 2-C6, C8, C10, 02 38 23.4 Mounting holes Manual override C6: One-touch fittings for 6 SX C8: One-touch fittings for 8 M5 X 0.8 External pilot port (Only external pilot style(R)) C10: One-touch fittings for 10 VK 02: Rc(PT)1/4 VZ (C6, C8) 17.5 10.5

Plug-in Unit

VQC1000/2000 VVQC 1 000-1A-D -C6 VVQC 1 000-3A-1-C8 -Wiring specifications Option Option Port size Nil R S Series Centralized exhaust External pilot Direct exhaust outlet with built-in silencer Nil B Note) VQC1000 VQC2000 None With back pressure check valve Symbol C8 C10 N9 N11 D S 0 Note) Double wiring Single wiring No wiring 1 2 VQC1000 VQC2000 Note) Except VQC4000.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723