Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Pneumatic Transfer System Series MF

6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

X Y T TT U UU V Model PP Q QQ R 4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x 0.7 thread depth 5.5 8-M5 x 0.8 thread depth 7.5 8-M5 x 0.8 thread depth 7.5 2-M6 x 1.0 thread depth 10 2-M8 x 1.25 thread depth 12 2-M8 x 1.25 thread depth 12 M6 x 1.0 x 12l M8 x 1.25 x 6l CXS20 8 7.75 9.5 6.5 12.5 M6 x 1.0 45 M6 x 1.0 x 14l M8 x 1.25 x 6l CXS25 8.5 13

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Sine Rodless Cylinder Series REBR Direct Mount Type

12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

Modular Type Lubricator Series AL

to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

Compact Cylinder

H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J E I 4-N through T D M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series AS-F AS-F Model TMH Speed controller with Applicable tubing O.D. Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard.

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

VZA2000

0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position 1/8 Body side M5 x 0.8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Single 0.54 0.19 2.2 0.56 0.23 2.4 Body side 2 position 0.54 0.19 2.2 0.56 0.23 2.4 Sub-plate side Double 0.54 0.19 2.2 0.56 0.23 Body side 2.4 M5

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

CQM

1 !2 !3 !4 !5 !6 !

Low torque Metal seal type Rotary joint Series MQR

8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure