IDG

Note 2) They are not applicable in case the thread type is N or F.

5 Port Solenoid Valve SY Series

-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7

Table of Contents

4-28 P. 2-4-23 P. 2-4-68 P. 2-4-59 P. 2-4-68 P. 2-4-60 P. 2-4-68 P. 2-4-63 Standard P. 2-4-92 P. 2-4-87 2-4-3 4 Series VQ/Body Ported: Variations Series VQ/Body Ported: Variations Manifold Variations F P T kit kit J kit kit Terminal block Flat ribbon cable connector (26, 20, 16, 10 pins) Conforming to MIL flat ribbon cable connector Flat ribbon cable connector (20 pins) D-sub connector Conforming

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Integrated Controller

H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

REC

Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Speed Controller with One-touch Fitting

Note 2) G thread is not available. 564 Speed Controller with One-touch Fitting Face seal AS Series Elbow Universal Brass Electroless nickel plated How to Order * Only G thread AS-F AS-F TMH ASD Type AS Thread type 2 Elbow 3 Universal G G AS-FE 2 2 0 F G A 1 AS 01 06 G thread KE AS-FG P F A 1 AS 2 0 2 01 06 R, NPT thread AS-FP AS-FM Body size Made to Order For details, refer to page 571. 2

MHZ2/MHZJ2

safety margin of a=4, which allows for impacts that occur during normal transportation, etc. 2 x F > mg Number of fingers When = 0.2 When = 0.1 mg F = x 4 2 x 0.2 and therefore, mg F > 2 x mg F = x 4 2 x 0.1 = 10 x mg = 20 x mg With "a" representing the extra margin, F is determined by the following formula: 10 x work piece weight 20 x work piece weight Note) Even in cases where the

Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.