Air Cylinder

10 (12) M5 x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

A

7/16 D I M E N S I O N S MORE DIMENSIONS S E E N E X T P A G E O V E R S I Z E D R O D R E A R F L A N G E M O U N T I N G T Y P E NC A1G (XB5) F Y XF BORE (INCH) KK A AA B BA C D DD E EA EE FA G J R UF WF P ZF MM TF 2.09 5 200 (2) 1 1/8 2.6 1.5 1 1/8 1/2 5/16-24 2 1/2 0.3 1.26 1.06 1.84 4 1/8 1 3/8 2.40 5 3/8 1 3 3/8 3/8 3/4-16 7/8 3/8 3/8 2.13 5 1/8 250 (2.5) 1 1/8 3.1 1.5 1 1/8 1/2 5/

Rotary Actuator

Port type Size Size 30 50 63 80 100 30 50 Nil M thread M5 Rc 1/8 1/8 1/4 3/8 TF G TN NPT TT NPTF 63 80 100 Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

CV/MVGQ

RHC L 50 100 1 D CV3K Without auto switch MK(2) L 50 100 1 Y7BW D CDV3K RS Q G With auto switch RS H A Number of auto switches Built-in magnet Bore size 40 50 63 2 pcs. 3 pcs. 1 pc. n pcs.

CV/MVGQ

(Except Type G) Nil S Z S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

VM

Push Button (Extended)/VM122-M5-32R, B, G, Y/VM132-M5-32R, B, G, Y JIS Symbol 2 port Panel mounted hole 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

•

1 :M6x 1 Y Rat type Flat with rib Deaptype Bellows type ,~ G H G H Rat Ratwith rib M5 M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Made to Order

CQS series MM (mm) Stroke adjustment range MH MT MA MM MK ML G A B L Bore size 12 16 20 25 22 (27) 56.1 (61.1) 3.5 30.6 5 8 M4 x 0.7 5.5 20 14 G 5 to 30 22 (27) 56.5 (61.5) 3.5 31 5 10 M5 x 0.8 5.5 20 14 MK ML 26 (36) 67.5 (77.5) 4.5 37 8 12 M6 x 1 7 24 20 5 to 50 MT L Stroke 29 (39) 71 (81) 5 37 8 12 M6 x 1 7 24 20 MA MH + Stroke B + Stroke Note 1) ( ): Denotes the dimensions with auto switch

Speed Controller with Indicator

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Type Made to Order Refer to page 27 for details. 2 Elbow 3 Universal Control type Note) Seal method 0 Meter-out 1 Meter-in Nil Without sealant S With sealant Note) Meter-out and meter-in types can be visually

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Hydraulic

Ht A 33 B G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs Reed switch D-A3 Solid state switches D-G39, D-K39 56 56 34 36 B A 49 Auto switch G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs Reed switch D-A44 36 B Auto switch D-A4 49 A Approx.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

CJ2

1 !