Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Precision Regulator

0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !6 e @1 @1 e tValve guide tValve guide Working principle (For IR2000) When the setting knob is turned, the nozzle is closed by the flapper allowing the supply air that flows in from the upstream side to pass through the fixed throttle.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

w q r u #0 MX MTS !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

VQ4000

Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R Seal (1) (2) Metal seal Rubber seal 0 1 1 2 3 Stations U side Note 1) Applicable to DC specifications. Note 2) For external pilot specifications, refer to page 2-5-39. Combination of the external pilot and perfect interface is not possible.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

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O-Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

Series HAW Water Cooled Aftercooler 1

Description Housing Outside tube Body Flower fin tube assembly Material Note SGP, SS400 STK FC200 C1220T Flower fin Flower fin q w e r q w e r Water chamber cover FC200 t AFF AM Replacement Parts Replacement Parts Misc. HAW22 HAW55 HAW75 HAW37 HAW110 No. Description HAW2 HAW7 Material No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

Table of Contents

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R

212

Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated 11 Nut PFA y r t !1 q u !0 o i Integral ttings/LQ1 w e Component Parts No.

1

Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.

180

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

t ASV q AK !

VZ100/300/500

Back up spring Poppet spring Note Platinum silver De-energized De-energized q w e Stainless steel r Replacement Parts Part no. No.

Precision Cylinder Series MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.