Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

Process Pump

AIR SUP (P1) Rc, NPT, G 1/8" (12.7) 119 106 13 79 39 14 FLUID IN 1/2" tube extension AIR SUP (P2) Rc, NPT, G 1/8" 59 110 Foot (Option) 611 PAF Series Dimensions: Air Operated Type (PAF3000 Series) With nut (with LQ1 fittings): PAF3413S-1S13 1S19 152 2 x M5 x 0.8 Thread depth 9 139 114 116 95 19 4 x 7 Bottom view of body FLUID OUT AIR SUP (P1) Rc, NPT, G 1/8" With nut 119 106 13 79 39 14

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1

CHKD/CHKG

Body mounting bolt tightening torques Tightening torque (Nm) 2.5 4 7 16 30 40 70 100 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 268 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Construction r !0 !1 q y !3 o i !4 !

CL

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Low Profile Guide Type

Bore size (mm) Cylinder fixing bolt Tightening torque Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 M3 0.55 to 0.72 Nm 10 15 25 M3 0.37 to 0.45 Nm M5 2.6 to 3.5 Nm M5 0.54 to 0.64 Nm 3. Be careful about the tightening torque of the hexagon socket head screws. Be careful excessive tightening may cause damage or malfunction of the shock absorber.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Vacuum Saving Valve

(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Environment

R 4 x O1 thread depth R (GH) FH EH M A + Stroke B + Stroke PC L LEPY LEPS Stroke LER 6 x MO thread depth MR XA H9 depth XA LEH LEY -X5 LEY -X5 MH Section XX details 11LEFS ML + Stroke (MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5

Ionizer

trimmer 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500, 1900, 2300 Fitting M-5P-X112 KJH04-M5-X34 Note) Note) Plug (M-5P-X112) 1 pc. is shipped together.

Process Gas Diaphragm Valve

A Connections: TW Connections: TW 1.0 (25.4) 1.0 (25.4) 45 45 AP SL M5 x 0.8 depth 0.25 (6.4) (Mounting hole) M5 x 0.8 depth 0.25 (6.4) (Mounting hole) AZ AZ AK Note) MV6 is bar stock body.

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L