VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

IDU/IDF

B 220V Dryer Capacity Model A Part No.

T

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

MXW Series Long Stroke Slide Table

L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Compact

B When LECP1, LECP6 or LECPMJ is used.

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

VNH

113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88

Process Valve

) 4 x 2 x 18 mounting hole SGC SGH B A VNC G F VNH VND A VCC Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model TQ VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 251.1 266.6 290.6 292.5 308 332 32 40 50 573 A VNB Series Specific Product Precautions Be sure to read this before handling

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

SFOD-OMT0011CN

SFOD-OMT0009) e) Download f) 34 No.SFOD-OMT0011CN-A (2) (2-1) a) Save b) Save c) (2-2) a) Load b) .datj Open c) 35 No.SFOD-OMT0011CN-A 4.4 4.1 (1-1-2) View (V) 4.2 (2) 4.5 ABS LIN-A 3 3 1) JOG 2) 3) [] a) Remote mode ON(SVRE ON) b) View (V) 4.1 (1-1-2) View (V) c) Return to Origin All axes Return to Origin d) JOG () 3 36 No.SFOD-OMT0011CN-A d-1) JOG

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 Product image For PROFIBUS DP (Plug, B-coded) Socket Plug Plug Socket Number of functional poles M12: 2 pins M12: 3 pins M12: 4 pins Key type B-coded (Reverse key) 3 4 4 3 5 1: VP 4: B Line 5 1: 2: A Line (Green) 3: 4: B Line (Red) 5: 390 1 2 2 1 Pin assignment 220 2: A Line 3: DGND Plug, B-coded Plug, B-coded (Viewed from the plug/socket side) 390 Fixed cable length 5 m Cable O.D

CRQ2

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 89 A A B Section BB Coupling P.C.D.

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Specifications Operating fluid Air 145 {1.0MPa} 13Pa {0.1Torr} 1,015psi {7.0MPa} 32 to 140 {0 to 60} JIS B 0203 (Taper pipe thead) Thread portion Nut None or with sealant JIS B 0211 Class 2 (Metric fine thread) Max.operating pressure Max.operating vaccum pressure Proof pressure Ambient and fluid temperature Thread Sealant (thread portion) Male elbow, Branch tee and Male run tee with sealant