5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2

Micro-Mist Separator with Prefilter Series AMH

OUT ~ 1-' ffi q=:J L ~I W ~ Drain (mm) Drain Model Port size A B AMH150 1/8,1/4,3/8 239 80 AMH250 1/4,3/8 252 80 1/2 258 284 AMH350 3/8,1 /2 290 80 (mm) 3/4 Connection Model AMH450 1/2,3/4 1 305 312 80 A 240 B AMH450 AMH550 AMH650 AMH850 3/4B,FF,10K lB,FF,10K 256 AMH550 3/4 ,1 339 80 260 300 349 1 1/2B,FF, 1 OK 2B,FF,10K AMH650 1,11/2 391 80 300 AMH850 11/2,2 540.5 80 380 496.5 SMC CORPORATION

V

48.5 63.6 25 89.5 79.5 10 15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

S070

End Plate Assembly > q U end plate assembly no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

RQ

Hs A B A B Proper Auto Switch Mounting Position Auto Switch Mounting Height D-A7H D-A80H D-F7 D-A7H, A80H D-A73C, A80C D-F7, F7V D-F79F, J79 D-J79C, F7W D-F7WV, J79W D-F7BAL, F7BAVL D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-A7 D-A80 D-A73C D-A80C D-J79C D-A79W D-F7WV Bore size (mm) D-A7, A80 D-A79W D-F7NTL Bore size (mm) D-J79 D-F7W D-F7BAVL Hs Hs Hs Hs Hs Hs 20 A B A B A B A B 25 20 32 25 31.5

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Series IDG

B C D E F G H K L M N Model P 255 276 Q 241 262 275 270 80 185 365 288 286 90 188 368 241 262 16 19 129 147 7 9 22 25 95 108 50 55 IDG60V, 60HV IDG75V, 75HV, 100V, 100HV 3/8, 1/2 1/2 31 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LV, 75LV, 100LV IDG60SV, 75SV, 100SV 91 Port size 3/8, 1/2 334 77 180 50 Purge air for dew point indicator 18 13 22 IN OUT 40 10 165 (B) Drain

air-filter-e

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Air Preparation Equipment

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Non-contact Gripper

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o

CC

Moving forward Moving backward Actuator 10-17-6 7 Air-hydro Unit Series CC Hydro Unit Air port size Rc RE A B REC CX CY Lube-plug 4-T Mounting hole MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Rc 1/8 Pilot air port port (Stop valve side)

MQQ

Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5

Fitting Type: E (Union Elbow), Size Combination-A Side: 4B (Applicable Tubing Size 3/8" x 1/4", Flange 15A), Different Diameter-B Side: 4A (Applicable Tubing Size 1/2" x 3/8", Flange 15A)

Fitting Type: T (Union Tee), Size Combination-A Side: 4A (Applicable Tubing Size 1/2" x 3/8", Flange 15A), Different Diameter-B Side: 4B (Applicable Tubing Size 3/8" x 1/4", Flange 15A)

Fitting Type: T (Union Tee), Size Combination-A Side: 4B (Applicable Tubing Size 3/8" x 1/4", Flange 15A), Different Diameter-B Side: 4A (Applicable Tubing Size 1/2" x 3/8", Flange 15A)

Fitting Type: U (Union), Size Combination-A Side: 4A (Applicable Tubing Size 1/2" x 3/8", Flange 15A), Different Diameter-B Side: 4B (Applicable Tubing Size 3/8" x 1/4", Flange 15A)