KT10

Materials [316 SS] An austenitic stainless steel with a higher nickel content to improve its corrosion resistance. [316L SS] A low-carbon form of 316 SS which has better intergranular corrosion resistance than 316 SS. 143 Technical Data/Glossary of Terms [Compression fitting] A self aligning tube fitting that uses a ferrule to compress on the tubing effecting a seal when the nut is tightened

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive position 143

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across flats 1.5) 22 25 2 x M5 x 0.8 Port size 2 65 69 4 4 9 5 9 4.5 4.5 24 11 B port A port 5.5 2.2 40 5 3.2 5.5 98 (117): With auto switch 84 (103): Without auto switch 138 (157): With auto switch 124 (143

SMC

29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143

Rotary Actuator/Vane Style Series CRB2

Note 4) For size 40, each block comes with 2 holding bolts. 143 Series CDRB2/CDRBU2/CRB1 With Auto Switch Applicable Auto Switch Applicable series Auto switch model Electrical entry D-90, D-90A Reed switch Grommet, 2-wire D-97, D-93A CDRB2BW10/15 CDRBU2W10/15 D-S99, D-S99V Grommet, 3-wire (NPN) Solid state switch D-S9P, D-S9PV Grommet, 3-wire (PNP) Grommet, 2-wire D-T99, D-T99V Grommet,

Rotary Actuator/Vane Type

Size CRBU2 [g] Reduction rate [%] Current model [g] 10 42 12 47.5 15 64 12 73 20 Interchangeable mounting with the current model 130 10 143 30 248 5 263 40 465 5 491 Compared with single vane at 90 Six types of direct mounting are possible.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

CV/MVGQ

45 40 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 CV 14 10 11 53 50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke Single Acting/Spring Extend MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q Symbol Bore (mm) 20 25 32 40 QY CC Z Z Z S S S Z S ZZ ZZ ZZ ZZ S Z ZZ 20 25 32 40 65.3 19.8 112 137 87 143

7

IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 ( ): Denotes the Normally Open (N.O.) dimensions. 143

3

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 (663)(179) 0.9 0.95 Downstream pressure of valve (P2) [MPa] (662)(174) 0.9 0.8 0.85 (661)(170) 0.8 0.7 0.75 0.7 Subsonic (660)(164) 0.6 0.65 Critical pressure 0.6 (658)(158) 0.55 0.5 0.5 Sonic (656)(151) 0.45 0.4 0.4 0.35 (654)(143) 0.3 0.3 0.25 (650)(133) 0.2 0.2 0.15 (646)(120) 0.1 0.1 0.05 VXS235 Port size 1/4 VXS235

XLAQ/XLDQ

sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

Stability of suction position,

ZP3E-T63BMl-B18 ZP3E-T80BMl-B12 ZP3E-T80BMl-B18 Width across flats 24 32 61 Width across flats 24 32 50 A A 43 57.5 12 B 35 49.5 12 B 18 12.5 85 80 57 68 63 45.8 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T63BMl-B12 M12 x 1.75 12 103 100 123 ZP3E-T63BMl-B18 M18 x 1.5 18 92.5 89.6 113 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T80BMl-B12 M12 x 1.75 12 148 143

MVGQ

DMVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions -X Symbol A E Symbol Bore size (mm) 80 DB E A DB Stroke Bore size (mm) Up to 50 st Over 50 st Up to 50 st Over 50 st 2080 84 143 9.5 25 68.5 93 28 18.5 Data 100 100 89 153 5 30 69 105 36 21 10-16-17 18 Series MVGQ Construction Series MVGQM For 12 to 25: MVGQM12 to 25 Over 50 stroke Courtesy of Steven

RZQ

REC Table 2 Additional Weight Unit: kg Bore size (mm) CX Item Model 32 40 50 63 RZQ RZQL RZQG,RZQF RZQD 10 mm increase of first-stage stroke 3 3 6 15 CY Foot style (including bolts) 143 155 243 324 Flange style (including bolts) 165 198 348 534 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

C85

32 15 8 15 50 12 16 8 17 10 22 11 28 20 11 33.5 S Z ZZ XC Bore 1 to 50 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153(156.5) 127(130.5) 101(104.5) 169(172.5) 143

MB

16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143

CQM

Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288 125 143

MU

1.5 M12 x 1.75 ZZ 74 77 85 102 106 Model MUB25 MUB32 MUB40 MUB50 MUB63 Model MUB25 MUB32 MUB40 MUB50 MUB63 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 The position of the four flats of the piston rod is 3 in relation to the cylinder side surface. 7-8-16 17 Plate Cylinder Single Acting, Single Rod, Spring Return/Extend Series MU Dimensions of Each Mounting Axial foot style CUJ (mm) ZZ 114 127 143

MGQ

56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143