VZ100/300/500 Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.
Cylinder port is located at U side of body n: Station Max. 16 stations Equation= VQ Dimensions/Side entry connector [FS] (mm) L1=10.5n+14.5 L2=10.5n+25 n L 1 35.5 46 125 135.5 16 15 182.5 193 275 285.5 14 172 182.5 262.5 273 13 161.5 172 250 260.5 12 151 161.5 237.5 248 11 140.5 151 225 235.5 10 130 140.5 212.5 223 9 119.5 130 212.5 223 8 109 119.5 200 210.5 7 98.5 109 187.5 198 6 88 98.5
DICOM 1 24 VDC Failure Note 3) 9 ALM RA1 N OPC 2 12 MBR RA2 Electromagnetic brake interlock DOCOM 13 S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B phase pulse detector (Differential line driver) 18 LBR Xmmm INP 10 19 LZ Z phase pulse detector (Differential line driver) 20 LZR Xmmm Control common 14 LG
Digital Flow Switch For Air Series PF2A How to Order ZSE ISE Integrated display type PF2A7 10 01 27 PSE Flow rate range Z I SE3 Thread type Unit specifications 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Nil N F Rc NPT G Nil M Wiring specifications With unit switching function Fixed SI unit Note) PS 3 m lead wire with connector Without lead wire
0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.
External sensor sampling cycle setting mode E x t e r n a l S e n s o r S a m p l i n g C y c l e M O D E < 1 8 0 s e c [External sensor sampling cycle] Setting range: 10 to 999sec Min. increment: 1sec Indicated content: External sensor sampling cycle (Ex.: 180sec) Function: Sets sampling cycle of external sensor for learning control or external tune control.
10 14 20 28 V MX V MTS Selection Calculation MY For selection of a proper model, find load factors (n) and make sure that their sum total (n) does not exceed 1.
(mm) a b Note 2) Effective area (mm2) Applicable tube b Q Weight (g) Note 1) D2 Note 1) D1 D1 L1 L2 L3 M1 N O M2 Model 3.2 4 6 8 10 12 4 6 8 10 12 16 KQG2T23-04 KQG2T04-06 KQG2T06-08 KQG2T08-10 KQG2T10-12 KQG2T12-16 8.5 11.5 20 29.8 41.3 58 3.8 7.1 16.4 36 56 108.5 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 4.1 4.4 6.4 7.1 8.1 9.1 9.1 11.4 13.7 16.6 18.7 24.6 8.3 9.1 11.4 13.7 16.6 18.7 14.2
S M Z MU B 25 10 S S Z M M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.
How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow
Grinding fluid (Grinding machines) Fiber element Polypropylene 10 Grinding fluid (Oilstone) Fiber element Polypropylene 10 Lubricating oil Fiber element Polypropylene 50 Cooling water Fiber element Polypropylene 10 Cleaning water Fiber element Polypropylene 10 Developing fluid Fiber element Cotton 50 Lacquer Fiber element Cotton 10 Nitrogen gas Fiber element Cotton 10 Carbon dioxide Fiber
Widely applicable to different types of equipment CLK1 CLK1 Stroke (mm) Clevis width (mm) Bore size (mm) Switch mounting Series 12 32 Band 50 N 75 N 100 N 125 N 150 Built-in standard magnet type Applicable to magnetic field resistant auto switches D-P4DWl CLK2Gl series 16.5 40 Rod, Band 16.5 N 19.5 50 N 63 Built-in strong magnet type Applicable to magnetic field resistant auto switches D-P7ll
F F 1 2 1 2 MHL2-10DZ MHL2-16DZ MHL2-16D Z MHL2-10D Z 60 60 25 25 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa 50 50 20 20 Pressure 0.6 MPa 0.5 MPa Pressure 0.6 MPa 0.5 MPa 40 40 15 15 0.4 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 0.4 MPa 10 10 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 10
Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin
Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.
Number of auto switches B Through-hole/Both ends tapped common (Standard) 32 mm 40 mm 50 mm 63 mm Number of auto switches Nil S n Nil S n 2 pcs. 1 pc. n pcs. Bore size 12 16 20 25 12 mm 16 mm 20 mm 25 mm Cylinder stroke (mm) Auto switch Nil Without auto switch (Built-in magnet) Cylinder stroke (mm) For the applicable auto switch model, refer to page 10-3-10.
C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46
How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow
Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A
M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 7 8 Magnetically Coupled Rodless Cylinder Series CY1F Low Profile Guide Type/10, 15, 25 How to order CY1F R 10 300 F9BW Number of auto switches Nil S n 2 pcs. 1 pc. "n" pcs.