Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Option ZS-39-5G ZS-39-B ZS-39-D ZS-39-R ZS-39-01 ZS-39-N1 ZS-39-N2 Lead wire with connector (with connector cover) (5 cores, 2 m) Panel mount adapter Panel mount adapter + Front protective cover DIN rail adapter Front protective cover R1/8 piping adapter NPT1/8 piping adapter Made to Order 1

A-HEC-OM-J004

1-2 1.1.3 Symbols. 1-2 1.2 Hazard Warning Labels . 1-4 1.2.1 Location of hazard warning labels . 1-5 1.3 Location of Model Label. 1-7 1.4 Safety Measures . 1-8 1.4.1 Precautions. 1-8 1.4.2 Protective Equipment . 1-9 1.4.3 Long-term Storage . 1-10 1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2

Precision Regulator

(C) m 2 Main valve MPa/ m (S) 1 1 Displ Press Press. Displ m Displ m Block diagram spring Compd. spring Compd. m MPa MPa (A) m/N (B) m/N Force N Diaph.(C) m2 Daiph.(A) m 2 Force N -6- 3.

Pneumatic Positioner IP300/IP3100

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Air Suction Filter Series ZFA 1

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

output PNP open collector 1 output + Analog voltage output PNP open collector 1 output + Analog current output ZSE10 ISE10 ISE70 ZSE80 ISE80 Rated pressure range ISE30A 0.1 to 1 MPa Made to Order Made to Order (P.43) PS For positive pressure ISE30A 01 N M Symbol Specifications/Description X510 For M12 4-pin pre-wired connector ISA3 Available only for output specifications A, B, and option

CYP_EN

10-AS2301F-01-04-X214 Resin-body Universal type 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 One-touch (Restrictor) fitting 10-AS2301F-01-06-X214 mounted type 10-AS1001F-04-X214 10-AS2001F-04-X214 In-line type (Restrictor) 10-AS1001F-06-X214 10-AS2001F-06-X214 10-ASD230F-M5-04 10-ASD330F-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series

E-P HYREG ® VY1 Series

Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot may be mounted.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

3 Port 3 Position Valve Body Ported VEX3 Series

3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

It may cause damage to the parts. 1 B

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 603 AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D.

IR1000/2000/3000

Nil For IR1000/2000 series Port size Bracket, Name plate, Mounting on the opposite side R Note 7) 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Application Size Symbol IR1000 IR2000 IR3000 01 02 03 04 1/8 1/4 3/8 1/2 Accessory For IR3000 series 0.01 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa Nil B G Note 3) None With bracket With pressure gauge 0 1 2 Note 1) Air operated type is

5 Port Solenoid Valve

B B B 61 106 107.8 9 9 29.5 VQ 1/2 80 A A A A A 192.8 R1 5 R2 3 179 179 155 VQ 4/5 1 P PE VQC 1/2 29.5 B B B B B VQC 4/5 VQC 4/5 12 21 47.5 VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port VFS 1/2" 3(R) port 3/8", 1/2" 4(A), 2(B) port VFR M5 x 0.8 Ground screw VQ7 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.7 3 1 69 55.5 53.7 45.5 12 X 4 A 4 A 4 A 4 A 4 A 4 A