Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

ITV-E

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

IDX-OM-W014

. 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1 . 10-1 10

IDX-OM-W053

(Ex.) 12-2 (Rc1/2) 25mm (R1/2) (R1/2 (L ) 12 1 12 L ADH4000-04 N.O() 1.6MPa 0.05 1.6MPa 400cc/min(0.7MPa ) 12-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 12-4 1. (1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4.

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 04 (4 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 04 (4 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 04 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 04 (1/2), Thread: T (NPTF)

Size: 40 (1/2), Reverse Flow Function: None, Thread: Rc, Port Size: 04 (1/2), Accessory 1: B (Bracket), Pressure Gauge Angle: G1 (Mounting Angle 0°), Accessory 2: None, Option 1: 8 (Metal Bowl w/Level Gauge), Option 2: None, Option 3: None, B: B

Size: 40 (1/2), Reverse Flow Function: K (Reverse Flow Function), Thread: F (G), Port Size: 04 (1/2), Accessory 1: B (Bracket), Pressure Gauge Angle: G1 (Mounting Angle 0°), Accessory 2: None, Option 1: 2 (Metal Bowl), Option 2: None, Option 3: None, B: B