VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

MXH Series Compact Slide

When the table is subjected to an impact load, there may be permanent distortion of the guide unit and increased displacement. 30 Compact Slide MXH Series Table Displacement Table displacement due to roll moment Table Accuracy Table displacement (at A) when a load acts upon section F at the full stroke of the compact slide Stroke (st) Running parallelism 5 to 30 40 to 60 F 0.05mm or less

7.4

1(P) 3(R2) 3(R2) OUT side port size Option IN side port size Nil None D DIN rail mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting C4 4 One-touch fitting Note) When multiple symbols are specified, indicate them alphabetically.

VND

74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be sure

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Rotary Table

Maintenance and Inspection 36 Regular inspection 36 Replacement procedure of the seal kit Troubleshooting 42 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-T1_C

.**. 29 (2-3) LECPLECA .32 1 - (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (

Check Valve Series AK 1

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Model *1 Port size A B D E300-03-A 3/8 31.8 30 30 E400-04-A 1/2 31.8 36 36 Port size B *1 in model numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

AME

G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650

EXxx-OMN0035CN

No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

AME

J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 1/2, 3/4 1 3/4, 1 1, 1 1/2 1 1/2, 2 36 9 205 19 100 106 3 106 10 AME450 Related poroducts 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

Compact End Lock Cylinder Series CBQ2

7 28.5 M6 x 1.0 10 40 22 18 36 7 28.5 M6 x 1.0 10 50 28 22 44 8 33.5 M8 x 1.25 14 63 30 22 44 8 33.5 M10 x 1.5 14 Rod end nut L1 The clevis pin and snap ring are packed with the clevis.

AC Servo Motor Driver (MECHATROLINK-III type)

Station Address S1 S2 00H to 02H: Disabled 0 0 to 2 (Do not use these addresses.) 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled F 0 to F (Do not use these addresses.) (2) Settings of the DIP Switch S3 The following table shows the settings of the DIP switch (S3). Switch No.

VVXA21/22

33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

VXR21/22/23

E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270

Multistage Ejector Series ZL112/212 1

.S. or less Repeatability 1% F .S. or less Operating voltage 12 to 24 VDC (Ripple 10% or less ) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 mA or less 45 mA or less 26, 27: 50 mA or less 67: 60 mA or less Current consumption Pressure indication 3 1/2 digits