FGD-C

FGDTF*-06 (5) FGD-CV006-03 FGDCE*-03 FGD-CV006-04 FGDCE*-04 FGD-CV006-06 FGDCE*-06 FGD-OP001 FGD*B (10) KT-FGDC FGDC KT-FGDE FGDE (2)(4)(6)(13)(16) KT-FGDT FGDT KT-FGDF FGDF FGD-CA002 FGDT,F(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

C95

Nil Without auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size B L F G C D T Basic/without bracket style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T For

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Sysytem Figure Silencer System Solenoid valve Speed controller 4 X M5 6 X M5 6 X 1/8 6 X M5 AS1301F-M5-04 A SYJ3000 M5 X 0.8 (S = 1.8mm2) AS1301F-M5-06 B q AN120-M5 (S=5mm2) AS2301F-01-06 C 6 X M5 AS2001F-06 D w 1.2-9 Series SYJ3000 How to Order Bracket Light and surge voltage suppressor Configuration S Z R U Without light and surge suppressor With surge suppressor With light

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Quick Exhaust Valve Series AQ 1

Effective area (mm2) AQ Model 4 1/4" IN OUT OUT EXH. 6 With silencer With exhaust port fitting AQ240F-041.7 2.5 ASV AQ240F-062.4 2.7 AK AQ340F-064 4 How to Order AQ240F-072.4 2.7 ASS AQ340F-074 4 2 4 0 F 06 06 AQ ASR Circuit ASF Quick exhaust valve With silencer Exhaust port 00 04 06 07 With silencer Applicable tubing O.D. 4 Applicable tubing O.D. 6 Applicable tubing O.D. 1/4" Body size

DOC1003626

Field name Example RTU mode ASCII mode (HEX) character data binary data Header : None Device address 0x01 0,1 0x01 Function 0x04 0,4 0x04 Quantity of bytes to read 0x02 0,2 0x02 Information of 0009h(Data display 1) 0x00FA 0,0,F,A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 * Response message at an ambient temperature of 25.0C 3.13 Register

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N T, F, N are order made specifications.

Return Filter FH100 Series

Precautions FH100-06 to 24: Nominal filtration 10 m q Mounting Confirm IN and OUT before mounting.

70pvpump

N 1 PTFE T, F, N are options.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Repeatability 3% F .S. Sensitivity 0.5% F .S. Linearity 3% F .S. or less Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.)

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

How to Order VR 12 1 06 0 F Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 2 1/8 standard 1/4 standard 23 04 06 08 10 01 03 07 09 11 3.2 4 6 8 10 1/8" 5/32" 1/4" 5/16" 3/8" With One-touch fitting Use 1/8" tubing for 3.2. 1 Series VR120F Application Circuit Examples Self holding circuit 1. When "A" is turned ON, output goes ON. 2.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.