SMC Corporation of America
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Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Z direcMn (3 1imes for each direc1lon) a o Weight 45g Oncl.O.6mlong lead wire) Note I , , c l V Port size OLR (PTI 1I8.M5XO.8 T' :NPTFl I8.M5 X O .8 Alrnosphenc pressure Rated pressure Pressure The hystelesls is 3 digits.so separate PI from P2 by 7 digits or more and set them. *1 digit IS the mmimum pressure display unit. (See the table above.)

For the function, refer to P.5-29,P.5-30 [Temperature range monitoring function setting example]. HRR Series 5.5 Advanced setting mode 5-31 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Temperature range monitor start time 24. Press the [] key.

Hs T (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ Hs IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 46 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 50 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 56 72 17 12 Series CLK1 Clamp Cylinder with Lock Accessory Dimensions (mm) Single Knuckle Joint Double

(Refer to p.2.0-0 of fittings and tubing.) Accessory (Option) Part No. Part No. Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

HRSH150-W-20-*T HRSH200-A-20HRSH200-W-20R8-5 M5 30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460 to 480 1 x 14 mm2

Built in T-slots T-slots are provided on 3 faces of the body (except port face), allowing mounting for various brackets. (Not suitable for mounting the cylinder itself.) Non-rotating accuracy Bore Size (mm) Non-rotating accuracy 0.08 0.06 0.05 40 63 100 Note) Within allowable rotation torque.

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Working Principle Diagram VY1 Pressure display VBA VBAT Output signal Power supply i Control circuit AP100 Input signal w Exhaust solenoid valve q Air supply solenoid valve e Built-in regulator Built-in regulator EXH Solenoid valve EXH P u Pressure sensor t Diaphragm r Pilot chamber EXH y Air supply valve SUP OUT 959 ITVH2000 Series ITVH2000 Series Linearity Hysteresis 2.5 1.0 Output deviation

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

groove (2 positions) S O 15 3 15 10 0 0.05 5 9 4 7.5 Note) For single acting, one port is used as a breather port. 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

6N 1 1 5 00 DIN /O 16 16 25 25 32 1.5m 1 32 1 3 3m 3 5 5 5m ( DC24V ( DC24V A A NPN NPN 6N LECP6/LECA6 6N LECP6/LECA6 ( PNP PNP 6P 6P NPN NPN 1N * LECP1 1N * 48mm T T LECP1 PNP PNP 1P * 1P * NPN NPN AN * AN * LECA6 LECA6 PNP PNP 3 00 mm 300 300 AP * AP * 2000 2000 2000 mm B 8m 8 8 B 10m 1.5 m 1 1 A A 15m m 3m 3 3m 3 B B 20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00