Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C4H (ø4 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7H (ø1/4" One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7H (ø1/4" One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Transfer

41 56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1

VNH

1(P) 12(P1) Nozzle 2(A) 3(B) port (Coolant liquid EXH port) 3(B) Plug Tank Coolant Pump 2 port valve application (Not applicable for 7.0 MPa model) 17-4-31 2 Series VNH How to Order VNH 15A 2 1 1 A 1 T Note) Silencer is provided as standard on pilot EXH port (P2).

High Power Cylinder:

9 t !8 @2 @4 !