VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Air Slide Table Series MXS

Ea = 1 x 0.11 = 0.11 Can be used based on E = 0.088 Ea = 0.11 Ea = K Emax Workpiece mounting coefficient K: Fig. (3) Max. allowable kinetic energy Emax: Table (1) Kinetic energy (E) Allowable kinetic energy (Ea) Load Factor 3 3-1 Load Factor of Load Mass Wa = KWmax Workpiece mounting coefficient K: Fig. (3) Allowable load mass coefficient : Graph (1) Max. allowable load mass Wmax: Table

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

Digital Flow Switch (Remote type sensor unit)

Liquid leakage. -21No.PF-OMO0014-D Specification Specifications Model PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 Applicable fluid water and ethylene glycol solution 50% (viscosity of 3 mPas (3cP) or less) 1 0 to 50 C Fluid temperature Without T: 0 to 50 C (no condensation or freezing) (no condensation With T: 0 to 90 C (no condensation or freezing) or freezing) Flow Rated flow range 0.5 to

3

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Programless controller (with stroke study) Step motor (servo 24 VDC)

Cable color T erminal no. Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orenge 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A / COM B-3 Blue 4 3 3m COM-B / A-3 Shield 5 5m Cable color T erminal no.

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

Applicable Stroke Table Compatible Controllers KStandard/K Produced upon receipt of order Stroke Model LEL25 100 200 600 700 800 900 300 400 500 Step data input type Programless type 1000 K K K K K K K K K K The actuator and controller are sold as a package. Type (Controller Page 13) Confirm that the combination of the controller and the actuator is correct.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

T) (mm) Dimensions PB T U Model LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm PA 28 9.6 34 17.5 A B 35 20 U 57 25 With flow rate adjustment & bypass (Max. T) (Max.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Lubrication Equipment

When the volume of oil in the case reaches a certain level, float e ascends, valve t descends via lever r, nozzle w closes, and the feeding of oil stops, thus completing the oil feeding process. When the oil in the case is consumed, float e descends, valve t ascends via lever r, allowing oil to be fed from nozzle w. G AL Selection Warning qAir should not flow from the secondary side.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

IDX-OM-U021

18 K 75 K16K (17) 64 (K16K) 17) JIS 65A 10K JIS 65A 10K 40 51 1276 1418) (14~18) 1375 (1) () (1) 1,3 1,3 () 7122 20 350 700 752 (3) (2) (2) IDF100150F 6-3 6 3 IDX-OM-U021 6 IDF150F-30K16K (10,2m) () ) JIS 80A 10K ( (10 () () (K16K) JIS 80A 10K 2m) 0.7m) ( ( (10, 20 18 t 268 217 9351 t A A 8x23 8x19 75 20 4x A 1300 720 1290 160 150 t K K K16K 64 (K16K) (17) 17) JIS

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

DOC1023125

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

MHC2

Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Component Parts No. Description No.

MHC2

Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !