VCC

Cleaning valve (2 port valve): 5 pcs. + Gate valve: 1 pc. 2 port valve mountable number Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 3 port valve mountable number 00 02 04 No 2 port valves used 2 pcs. (colors) 4 pcs. (colors) 00 02 04 No 3 port valves used 2 pcs. (colors) 4 pcs.

Electro-Pneumatic Proportional Valve Series VEF/VEP

03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Note 3) Polyurethane is only applicable for the ZFC050-02. SP Made to Order (Refer to page 1115 for details.)

Mist Separator

.: AMX-OMX0019-C PRODUCT NAME Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Micro Mist Separator

.: AMX-OMX0020-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Activated Carbon Filter

AMX-OMY0038-A PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK20-(F, N)01 ~ (F, N)02(B)(-2, 6, C, R, Z)-D AMK30-(F, N)02 ~ (F, N)03(B)(-2, 6, R, Z)-D AMK40-(F, N)02 ~ (F, N)04(B)(-2, 6, R, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5. Construction / Options / Replacement parts 10 6.

Micro Mist Separator

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0 0 0 0 0.020.2MPa 1 1 1 1 0.020.4MPa Set pressure range 2 2 2 2 0.020.8MPa 1 + 0 0 0 0 Bottom exhaust Exhaust direction 1 1 1 1 Front exhaust 2 2 2 2 Rear exhaust 2 + Nil Nil Nil Nil Rc Pipe thread type N N N N NPT F F F F G 3 + 02 02 02 02 1/4 Port size

Precision Regulator

Marking on product Product name plate IR2120 IR2120 IR2120 IR2120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa Product code INPUT INPUT INPUT INPUT PRESS. PRESS. PRESS. PRESS. 0.01 0.01 0.01 0.01 0.8MPa 0.8MPa 0.8MPa 0.8MPa OUTPUT PRESS. OUTPUT PRESS. OUTPUT PRESS.

Precision Regulator

G43-10-01 G43-P10-N01-X30 Port size 02 : 1/4 03 : 3/8 04 : 1/2 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4. Marking on product Product name plate IR3120 IR3120 IR3120 IR3120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.

PSxx-OMM0002CN

Ground () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 () NG -5No.PS-OMM0002CN-F SUS630SUS304 () * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Performance/Specifications General specifications LC5-1-T1-02 Part no.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

33

Note 2) If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water).