PAB-OM-B006-B Pilot air supply port (A I R S UP) S upplying pressure set by regulator. Use clean air. Pilot air exhaust port (A IR E X H) E xhausting pilot air. Reset F or resuming of normal operation after momentary stoppage.
A watertight seal can be obtained by hand tightening. LVN Never use a pipe wrench etc., as it may break the product. Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.
(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa
Compact Manifold Regulator Centralized Supply Type ARM5A Series How to Order A ARM5 1 A 4 A 07 Centralized supply type 2. Centralized Supply (IN) Piping Position 1. Manifold Mounting Direct mount B A Bottom 2 1 Symbol Symbol DIN rail mount Top How to mount Piping position OUT OUT IN OUT OUT OUT OUT OUT OUT Appearance Appearance IN 3. Regulator Block Stations 4.
B A N.C. Double acting With bypass PA PA N.C. PB B A B A Inch sizes Double acting 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA Basic size With reducer N.C. B A Port B (OUT) different dia. size N.C.
Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Base Mounted Plug-in: Single Unit VQC4000 Series How to Order Valves 0 VQC4 0 1 Plug-in 1 Thread type SV Nil Rc N NPT T NPTF F G SYJ Type of actuation 2-position single 3-position closed center SZ (A) 4 (B) 2 (A) 4 (B) 2 Port size 1 3 Nil Without sub-plate (For manifold) VF 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center 02 1/4 03 3/8 (A) 4 (B) 2 (A) 4
Manual override VQC 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center Nil: Non-locking push type (Tool required) B: Locking type (Tool required) C: Locking type (Manual) (A) 4 (B) 2 (A) 4 (B) 2 VQC 4/5 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQZ 2 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber SQ 5 1 (P) 5 (R1) 3 (
(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524
A B C D E F G H J Bracket dimensions Bracket part no. Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680
Pilot air supply port (A I R S UP) S upplying pressure set by regulator. Use clean air. Pilot air exhaust port (A IR E X H) E xhausting pilot air. Reset F or resuming of normal operation after momentary stoppage. of 0 .2 mm at least on IN port. Diaphragm should be changed before the life frequency.
Pressure 0.6 MPa 0.4 MPa 0.2 MPa Opening/Closing angle (Both sides) 12-9-3 4 Series MHT2 Dimensions 8-M6 x 1 mounting thread Thread depth 10 (Both sides) MHT2-32D 4-M6 x 1 thread depth 10 Mounting thread Open 28 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8
Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M6 x 1 thread depth 15 Mounting thread 4-M6 x 1 bottom hole dia. 5.1 Thread for mounting attachment MHT2-40D 8-M8 x 1.25 mounting thread Thread depth 10 (Both sides) 4-M6 x 1 thread depth 10 Mounting thread Open 27 Closed 3 Finger closing port Rc 1/8 Finger opening port Rc 1/8 4-M8 x 1.25 thread depth 12 Mounting thread 4-M8 x 1.25
Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.
Solenoid valve (Port size) Orifice symbol (Diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXK21 VXK22 VXK23 DC 01 (1/8) 02 (1/4) Port symbol (Port size) Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in fullwave rectifier type as a standard. 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (4) Bracket Part No.
Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 1 1 2 12 2 1 2 1 3 1 2 1 14 2 4 12 L 10 5 1 3 How to Order ARP 30 03 BE K Option / Semi-standard: Select one each for a to f.
industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .
0.8/0.8 7.5/8.3 0.7/0.8 Rated power consumption Note 4) (50/60 Hz) (kVA) Noise level Note 10) (50/60 Hz) (dB) 58/55 Fitting (for drain outlet) 1 pc., Input/output signal connector 1 pc., Power supply connector 1 pc., Operation manual (for installation/operation) 1, Quick manual (with a clear case) 1, Alarm code list sticker 1, Ferritic core (for communication) 1 pc.