Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket ZFA100 1 pc. on the left R LR Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type Applicable model Symbol 02 01 Port
(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.
Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.
Description Material Surface treatment ZX t NBR, Silicone rubber, Urethane rubber, Fluororubber, EPR u o Pad 1 ZR r e w Adapter plate 2 Aluminum ZM w Hard chrome plated Piston rod 3 Carbon steel w Spring 4 Stainless steel ZMA Buffer body 5 Aluminum Electroless nickel plated Buffer adapter 6 Brass q q q ZQ Electroless nickel plated Adapter A 7 Brass Electroless nickel plated X type adapter
The standard lead wire length IS 06m.Grommet L IS added for 3m long lead wire (Example) ZSE4B-Ol -25L Port size: 01 stands for R(PT)1/8 and TI tor NPTF1 /8 Both types have M5X0.8 female threads InSide, Option (Available separately) Panel mount adaptor No.
. : 1.7mm Be aware that there is an increase in the leakage voltage particularly if a C-R element (surge voltage protector) is used for protecting the switching element, because the leakage current flows through the C-R element. w Crimping the lead wire into the socket OPeel approximately 3.2 to 3.7mm of insulation from the tip of the lead wire, make sure that the ends of the core wire are
4 Valve assembly Note 1) Internal assembly: Assembly for parts r to !2 except !0. Note 2) Part no. for bowl assembly: AD34 Note 3) Part no. for bowl !0: 201016 14-20-49
1 2 1 Urethane Aluminum alloy Chromated Piston Bumper r !2 1 1 Resin Hard chromate plated Stainless steel Piston rod Magnet t !3 1 1 Carbon steel Zinc chromated Hexagon socket head screw Bushing Sintered oil-impregnated beaning y !4 2 1 NBR Rolled steel Cylinder tube gasket Seal holder u !
J K Nil N R H Nil Z Nylon tarpaulin Neoprene cross With cushion on both ends Without cushion With on rod end bumper With on head end cushion With connector Without connector Rod boot Cushion Connector Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 Rod cover Aluminum alloy Rod seal A NBR White anodized q !
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r Description Material Brass Brass Stainless steel Brass Body Brass Gasket PVC NBR NBR NBR Steel Steel Note Electroless nickel plated Electroless nickel plated Rod cover Cylinder tube Piston Seal retainer MB1 Electroless nickel
5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !8 Anodized End plate Rod seal NBR Aluminum alloy u !
0 Section AA' @0 u @8 r y !6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !
2 r MX w MTS MY e CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 CX o D-X 20Data !9 !8 i !5 u !7 q !
Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: ARV (A+R+V)
Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: AR (A+R)
Size: 25, Motor Mounting Position: R (Basic Type), Motor Type: A [Servo Motor, (24 VDC)], Lead: K (LES8: 4mm; LES16: 5mm; LES25: 8mm), Stroke: 30mm, Motor Option: w/o Lock, Body Option: Basic Type, Mounting: w/o Side Holder, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 6P [LECA6, (Step Data Input Type), PNP], I/O Cable
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Mounting Position: R (Right Side Parallel), Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 150mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic