M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(2 x M12 (5 pins)-M12 (5 pins)/SPEEDCON) Y connector For sensor #7 PCA-1557798 Y connector (2 x M8 (3 pins)-M12 (4 pins)/SPEEDCON) 219 M8/M12 Connector PCA/EX9/EX500 Series Other Accessories (EX500/EX9) p. 240 to 242 E B Cable with M12 connector Output block Seal cap (For socket) Power block EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX Type 1 Type

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Symbol Description Applicable shaft type XA1 to XA24 Shaft type pattern1 W XA31 to XA58 Shaft type pattern2 S, J, K, T, Y XC1 Add connecting ports W, S, J, K, T, Y XC2 Change threaded hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Cylinder with Lock Series CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H dimensions when single/double knuckle joint and rod end nut are mounted together A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately. ( Fasten

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Applicable bore size [mm] A1 D1 E1 L L1 MM ND NX NZ R1 U1 Split pin size Flat washer size Flat washer: Polished round MM Y-04D 40 22 10 24 55.5 55 M14 x 1.5 12 16+0.3 +0.1 38 13 25 3 x 18l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 14 28 55.5 60 M18 x 1.5 12 16+0.3 +0.1 38 15 27 3 x 18l Polished round 12 D1 Y-08D 80 37 18 36 76.5 71 M22 x 1.5 18 28+0.3 +0.1 55 19 28 4 x 25l Polished round

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Cylinder with Lock

MM +0.3 +0.1 Y-04D 40 3 x 18 l 16 Polished round 12 22 10 24 55.5 55 M14 x 1.5 12 38 13 25 E1 NX NZ L +0.3 +0.1 Y-05D 50, 63 3 x 18 l 16 Polished round 12 27 14 28 55.5 60 M18 x 1.5 12 38 15 27 D1 A1 L1 U1 +0.3 +0.1 Y-08D 80 4 x 25 l 28 Polished round 18 37 18 36 76.5 71 M22 x 1.5 18 55 19 28 RR1 +0.3 +0.1 Y-10D 100 4 x 30 l 30 Polished round 20 37 21 40 83 83 M26 x 1.5 20 61 21 38 Knuckel

IO-Link/ELECTRO-PNEUMATIC REGULATOR

(can be set in the range from 0 to 90%. *4) 0x46 (70) 0 R/W Minimum pressure U16 {0} Y Set setting pressure span point. (can be set in the range from 10 to 120%. *4) 0x47 (71) 0 R/W Maximum pressure U16 {4095} Y 0x48 (72) 0 R Accumulated energizing time U32 {0} Y Displays accumulated energizing time.

Square Tube Type Air Cylinder Series MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT L,L H K Y M H L E Model L W E W M LQ3H11-F LQ3H12-F LQ3H21-F LQ3H22-F LQ3H31-F LQ3H32-F LQ3H33-F LQ3H34-F LQ3H35-F LQ3H36-F LQ3H41-F LQ3H42-F LQ3H43-F LQ3H51-F LQ3H52-F LQ3H53-F LQ3H61-F LQ3H62-F LQ3H63-F 4 3 M 10 9 11 35 34 14 10 18.5 1/8" Y 40 45 39 44 18.5 21.5 1/8" 1/4" H 6 17 16 16 20 14 (E,E) 10 8 10 8 10 8 KK 50.5 47.5 18.5 1/8" D 22.5 19.5 21 55 52 25 18

AMX-OM-F005-C

FEATU RES N o back f l ow W at er drop cont ai ned i n com pressed ai r i s ef f ect i vel y rem oved j ust by O ver rat ed f l ow i nst al l i ng t hi s. You hardl y need t o repl ace t he el em ent of thi s product due t o uni que st ructure. CAU TI O N S O N U SE W ARN I N G Keep f ol l ow i ng i t em s to operat e w at er separator properl y.

FILTER REGULATOR

How to order Accessories NIL: None Port size Note B: With Bracket (130184) G: With Pressure gauge 02 : Rc1/4 IW212:G51-2-02 IW213:G51-4-02 IW215:G51-7-02 NoteOnly one size Setting pressure 2: 0.02~0.2MPa 3: 0.02~0.3MPa 5: 0.02~0.5MPa -6- 4.

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

CEx-OMQ0010

AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () () ( 8 ) CE2 14.5mT CE2 15000 18cm 7-2 ()() A /B (CEU1CEU5 )0.1mm 20 8-1 A() 8-2 2 15 0.3MPa 30 21 M4x10 LOCK

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Precision Regulator

OUTPUT PRESS. 0.005 0.005 0.005 0.005 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR2000 IR2000 IR2000 IR2000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range T T T To o o o G G G G MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.

Precision Regulator

OUTPUT PRESS. 0.01 0.01 0.01 0.01 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR3000 IR3000 IR3000 IR3000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range G G G G T T T To o o o MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.