Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 06 (3/4), Mounting: without Mounting Option, Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Interface, EX600), SI Unit: EA [EtherNet/IPâ„¢ (2 Ports)], SI Unit Common, End Plate: 4 (Power Supply w/M12 Connector, PNP), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: Direct Mounting, DIN Rail Option: DIN Rail Mounting, w/DIN Rail, Combination Manifold: M

.: NPN; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

.: NPN; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 02 (1/4), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

.: NPN; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Pressure Range: -0.1 to 1 MPa, Piping: R1/4, M5 Female, Bottom Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: Fixed SI Unit, Option 2: None, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: Single Action, Thread Type: Rc, Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve