Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center

SI Unit

If PWR(V) is enters the lockout state, make sure valve outputs are disabled before PWR(V) is restarted, otherwise valves may operate causing unintended start up. 38 No.EX##-OMY0011-A Appendix A: Glossary for PROFIsafe A definition of PROFIsafe terms is also provided in the PROFIsafe profile.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

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SX

-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with

48

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV1 M9BA1 v v V v v 1 Water-resistant type auto switches can be mounted on the above models

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

B D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Parallel electrical entry B A A D Reed Switch D-A90(V), D-A93(V), D-A96(V) Reed Switch D-A90(V), D-A93(V), D-A96(V) Set screw (included to auto switch) (mm) Stroke (mm) 20 45 25 51 31 Stroke (mm) 10 34.5 35.5

Digital Flow Switch (Remote type monitor unit)

As a whole product, the fluid temperature range is specified as 0 to 90 oC. -69No.PF-OMN0012-H Characteristics graph Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 5.9 mA 20 mA Rated flow

CLS

100 V Relay, PLC Reed switch Solid state switch A54 100 V, 200 V Yes A33 PLC 12 V Terminal conduit 24 V 2-wire A34 100 V, 200 V Relay, PLC A44 DIN terminal Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Grommet A59W Y59A 3-wire (NPN) IC circuit 24 V 5 V, 12V Y7P 3-wire (PNP) Grommet J51 100 V, 200

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

EXxx-OMW0014CN

OFF 8 V 4 PNP (C/Q) 0.25 A ( US1 ) 57 No.EX-OMW0014CN-A 9.3.

Compact Guide Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV M9NA v v V v v IC circuit 3-wire (PNP) M9PAV M9PA v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV M9BA v v V v v Water resistant type auto switches can be mounted on the above models,

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

CXS

Symmetric mounting Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

CXS

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

CQS

V A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire Relay, PLC Grommet 24 V 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 12 V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L

25

Ground with a ground resistance of 100 or less. F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

Slide Unit Series CX2/CXWM/CXWL

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LAT Applicable Stroke Table*4 V: Standard Model Stroke [mm] LZ 200 300 400 500 600 700 800 900 1000 1200 1500 LEJS40 V V V V V V V V V V LEJS63 V V V V V V V V V V LC3F2 *4 Please consult with SMC for non-standard strokes as they are produced as special orders. For auto switches, refer to pages 142 to 144.

MVGQ

Detaching To detach a socket from a connector, pull out the lead wire while pressing the sockets hook with a stick having a thin tip (approx. 1 mm).

MLGP

V(mm/s) = Load operating speed (ms) 4. Keep wiring as short as possible. 3) Generally, the internal voltage drop will be greater with a 2 wire solid state auto switch than with a reed switch. Take the same precautions as in 1). Also, note that a 12VDC relay is not applicable. 6. Pay attention to leakage current.