Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/

: 02 (Base Mounted w/Sub-plate 1/4)

: 02 (Base Mounted w/Sub-plate 1/4), Thread: T (NPTF)

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: R (Surge Suppressor Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: 02

: 02 (Base Mounted w/Sub-plate 1/4)

Port Size: 02 (Base Mounted w/Sub-plate 1/4)

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 1 (2 Position Single), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 02 (

), A, B Port Size: 02 (Base Mounted w/Sub-plate 1/4)

02 (Base Mounted w/Sub-plate 1/4), Thread: N (NPT)

02 (Base Mounted w/Sub-plate 1/4), Thread: T (NPTF)

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 02 (

: 02 (Base Mounted w/Sub-plate 1/4)

Type of Actuation: 2 (2 Position Double), Manifold Type: 40 (Base Mounted Non Plug-in Single/Stacking Base, Plug-in Stacking Base), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 02 (Base Mounted w/Sub-plate

IDX-OM-P026E

Checks and Inspection Hose Circulating pump Water quantity 20 to 30 L/min Pressure 0.1 to 0.3MPa 0. 10. 3 2030 L/m i n Fig. 2 ( ) Tank (drum can, etc.) b) Operation procedure when a cooling tower is used 1. If a cooling tower is used, supply the cleaning liquid and circulate it for a certain amount of time. 2.

VF1000-OMP0001

()ISO VG32 (MSDS) 2 ()ISO VG32 M5 M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi