VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

2n2-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 U side D side (L4) Applicable connector: 26 pin MIL type with strain relief (conforms to MIL-C-83503) L3 Connector entry direction switch 101.2 (3.2) 3.5 (With switch) 6.6 3.1 8 36.3 58.2 5.5 5.3 LOCK FREE Triangle mark 35 18 28.8 A B A B 47.6 A A A DIN rail 6 Triangle mark position 7.9 Manual override 22 In case of locking

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Information

6 !6 Component Parts Description Material Description Material No.

M Series

plating) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 7.

Clamp Cylinder

The valve may jump out depending on the amount of air pressure. 2-6.

Stainless Steel Heat

Air inlet 22 C Draft air inlet F L 16 M Model IDFS6E IDFS8E Port size J A B C D E F G H K L M 315 380 260 470 540 85 130 350 325 440 297 330 Rc 3/4 560 530 470 540 325 260 85 130 Rc 3/4 297 315 330 440 IDFS11E 605 575 325 355 540 285 110 130 315 Rc 3/4 325 485 515 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6 6 Series IDUS/IDFS Option Specification Refer to pages

Series 10-, 21- AW-B Filter Regulator

Fittings & Tubing Air Cylinders Rotary Actuators Nil 1 Note 6) Set pressure c 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting + Polycarbonate bowl Metal bowl Nylon bowl Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard + Nil 2 6 8 C 6C Bowl d Semi-standard J Drain port Note 7) Drain guide 1/8 Drain guide 1/4 + Nil N Exhaust mechanism e Relieving type Non-relieving type

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

VDW

Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

VDW Series

Enter together in order, counting from station 1 on the D side.

3 Position Cylinder Series RZQ

A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage stroke 50 or larger bore size D-P5DW 40, 50, 63 B + First-stage stroke

RZQ

40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

VFR3000 Series

Type T: 6 to 8 mm Type E: 2.3 to 2.8 mm Type D,Y: 4.5 to 7 mm Applicable crimp terminal Type E, T: 1.25-31.25-3S1.25Y-3N1.25Y-3S (Round shape or Y shape crimp terminal cannot be used for Type D.) DIN terminal block type Male pin terminal of DIN terminal block of solenoid valves are wired as shown below. Connect to corresponding terminal on the connector.

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

IDUS/IDFS

HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

MHx-OMZ0004

No.MH*-OMZ0004 / / JMHZ2-16D-X7400B-ASSISTA(-P) . 2 1. 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. () . 9 3-5. . 10 3-6. . 10 4. . 11 4-1. . 11 4-2. 3 . 12 4-3. . 13 5. . 14 5-1 . 14 5-2. . 14 5-3. . 20 5-4. . 20 5-5. . 20 5-6. . 21 6. . 21 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power

Ejector Valve Unit Series ZYY/ZYX

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35MZ-10S1-E15C-F ZYY35MZ-10S1-F 2SETS 1SET 1SET U side Stations3 2 1 D side 1084 Ejector

energy saving effect

HRSH 090 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSH HRSH No.