LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

44

16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

12-CY1B/3B/1R/3R/REA.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

L1 (Non-locking) Manual override A A 20 15 B B 5 48.5 [55] 2 (Pitch) P=10.5 12 2n-One-touch fitting 36.1 29.5 (A, B port) A A 20 15 B B Applicable tube: T0425 5 2 (Pitch) P=10.5 12 2n-M5 X 0.8 (A, B port) Other dimensions are the same as the M5.

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3 !4Fitting Assembly No. (For cylinder port) VVQ100051A !5Fitting Ass'y No.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPQR08-12 12 d 10 18.5 24 41 29 25.7 9 50.5 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

5 Port Solenoid Valve, Series VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

3

4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

MHK2

Refer to Auto Switch Hysteresis on page 12-6-16.

MHK2

Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

MK

ring Flange Hexagon socket head cap screw Piston rod y Except 12, 16 Except 12, 16 Bumper Ring nut Scraper pressure Rubber magnet u i o !