XLA- ∗ -F7NJ ∗ - ∗ Series

Rights Reserved 15 XL*-OML0013-B

Hand Valve Series VH

0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89 88 4-6.6 4-6.6 88 81 94 148 144 97 97 67 1.5 65 1.5 125 123 105.5 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-Rc1/4, 3/

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(ssssb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

VR4151/4152

If B is turned ON in 2. state, the output is turned OFF. If either A or B is turned ON, cylinder is actuated.

VH Series, 4 Way Hand Valve

25 25 25 4 (B) 1 (P) 3 (R) 74 1 (P) 62 62 49 2 (A) 45.5 46.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-1/4NPT 13.5 4-1/4,3/8NPT VH32 -N02/N03 (Bottom porting) 2 (A) 44 3 (R) 1 (P) 4-1/4,3/8NPT 4 (B) 5 Series VH Body Mount/Dimensions (mm) / Body mount type Dimensions VH40 -N02/N03/N04 VH40 -N06 Scale: 35% 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) 1 (P) 3 (R

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Compact Guide Cylinder

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Operator error could result in injury or equipment damage.

NGIP seies

I Accessories .10 How To Order ffi-ffi I L_ 1D ft tead wire Switch 9rffix _ -With two switches S-With one switch x Action (Double acting) x%" Stroke: S type only Type 90-D-90(1.5 ft. lead wire) 90AD-90A 97-D-97 93A-D-93A Without switch (built in magnet) End Thread With thread B Without thread B _Nose *D _Clevis mount F -Flange Mount L -Foot mount *T rTrunnion mount 'Auto switch capability

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

FGE-C

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

One-touch Fittings

Y Applicable tubing O.D.: 4, 6 Different Diameter Straight: KQ2H Effective area [mm2] Min. port size Release button dimensions a *1 D2 Release button dimensions b L M1 M2 Applicable tubing a Applicable tubing b Applicable tubing O.D.

Rotary Actuator

If air pressure is applied from the B port side, the shaft rotates counterclockwise.

NCRAI seies

(inclusive of rec'tangular prallelftped) . w d+b' ,=u4.i.u-a.rt s 3 ' s 3 Pcition of ftvot: Passesfrough the cefller of graviv pqperdbularto the rcp. Position ot pivct: Adis g 2 . . . ' ' . . . . ' Pcitbn d Fi'/ot: Passes tro{Jgh the cntet of gravity, parallel to side b. Posfiql ol fivot: Diameter , W 2 r 2 Pcitim ol pivot: Fdsses though orp erd perpendicular to the plate.

PSxx-OMF0005CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Rotary Actuator NCRA1 Series Single Rack and Pinion

(inclusive of rec'tangular prallelftped) . w d+b' ,=u4.i.u-a.rt s 3 ' s 3 Pcition of ftvot: Passesfrough the cefller of graviv pqperdbularto the rcp. Position ot pivct: Adis g 2 . . . ' ' . . . . ' Pcitbn d Fi'/ot: Passes tro{Jgh the cntet of gravity, parallel to side b. Posfiql ol fivot: Diameter , W 2 r 2 Pcitim ol pivot: Fdsses though orp erd perpendicular to the plate.

S070

2 3 Port size Symbol Nil M3 M5 Sub-plate Without sub-plate Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With sub-plate S070 B 5 B G Base mounted S070 C 5 B G 32 Body ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable

AIR SLIDE TABLE

A,B),25(A) has magnets on both sides. 10 Rod cover Aluminum alloy Anodized Stainless steel (MXQ6(A,B)) 11 Seal support Brass (MXQ8(A,B,C),12(A,B,C)) Electroless nickel plating (MXQ8(A,B,C),12(A,B,C)) Aluminum alloy (MXQ16(A,B),20(A,B),25(A)) Chromate treatment(MXQ16(A,B),20(A,B),25(A)) 12 Head cap Aluminum alloy Anodized 13 Floating bushing Stainless steel 14 Floating bushing Stainless steel