SMC Corporation of America
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Chemical resistance 260oC 260oC 260oC 200oC Heat resistance 6 6 ? 6 Flexibility ? ? ? Ion elution 6 ? ?

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2. Replacement part .24 6-3. Maintenance .24 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

T1, T2Inverter pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting

None With light/Surge voltage suppressor (Except type G) With surge voltage suppressor (Type G only) VX2 Option Option S VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Function plate (D seal, with thread): DXT060-32-4A Electrical entry G E T D VX3

Dimensions (unit: mm) EX120-SCM# -32No.EX-OMM0008-D EX121-SCM# -33No.EX-OMM0008-D EX122-SCM# -34No.EX-OMM0008-D Revision history A: Add the contents.

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS 1322Air Slide Table Dimensions: MXS6 13221322Axial piping (6): MXS6-P 26.3 Max. 5.6 Operating port 2 x M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic type. 781 MXS 1322Air Slide Table Dimensions: MXS6L / Symmetric Type 1322Air

Parts description of Air gripper . 5 3.Product Specifications . 6 3-1. Specifications . 6 3-2. Gripping force . 7 3-3. Gripping point . 8 3-4. Dimensions (when the cover and attachment are mounted) . 9 3-5. Connector and pin layout . 10 3-6. Center of gravity . 10 4.Product Specifications . 11 4-1. Air Gripper . 11 4-2. 3 Port Solenoid Valve . 12 4-3.

Blocks. 6-6 6.5.4 Select Signal Order . 6-6 6.5.5 Adding a Logical Condition. 6-6 6.5.6 Select Signals to Drive Functions. 6-7 6.5.7 Setting Parameters. 6-7 6.5.8 Operation Check . 6-7 6.6 Simulation Mode.6-8 6.6.1 Entering the Simulation Mode . 6-8 6.6.2 Turn Signals On/Off. 6-8 6.6.3 Change Function Block Parameters. 6-8 6.6.4 Force Outputs On/Off. 6-8 6.6.5 Inactive Functions during Simulation

Step 8 3 Bolt b Tightening torque of bolt b Nm Valve 1 2 Size Tightening 4 Torque X*D-25 1.5 -40 2.5 -50 6 -63 6 Bonnet assembly -80 15 Pilot port M Body Apply 0.2MPa of air pressure to the pilot port M (for main pumping). Tighten bolt b in numerical order to assemble the body and the bonnet assembly.

6 6 Carbon Borosilicate microfiber multi-wrap Element Media 10. 11.

How to Order 6 4. Mounting 4-1. Precautions for mounting 7 4-2. How to mount 9 4-3. Wiring table 15 4-4. Power supply cable wiring diagram 16 4-5. Timing chart 16 5. Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1.

/ SS3YJ7-41RStation -01 Grommet (G), (H) 14 21.5 30.5 2-5.5 2-M5 X 0.8 (Mounting holes) (External pilot port) 69.5 [76] 71.2 (GZ, GS: 71.9) [72.9] 63.5 22.5 9.5 6 21.5 50.3 57.1 50.5 35 X P 43 C6: MAX. 6 C8: MAX. 6.5 R n-R c(PT)1/8 (Lead wire length) (A port) G: 300 H: 600 4-Rc (PT)1/4 (Pitch) 15 (P/R port) L1 L2 P=19 6 Manual override Manual override Depress and turn to operate and lock

Throttle/Manual lock of 2 port solenoid valve Stations Nil C W M Without throttle, without manual lock With throttle, without manual lock Without throttle, with manual lock With throttle, with manual lock 1 2 3 4 5 6 1 station 2 stations 3 stations 4 stations 5 stations 6 stations Throttle Option Nil B Without bracket With bracket With mounting bracket for DIN rail Manual lock D Note) DIN

Note 6) When the current output is selected.