Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Body Ported, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube

Piping: Base Mounted, Stations & Port Location: 12 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 1/4" Tube

Piping: Body Ported, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

240

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41

08-ca2wh-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 41

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

48

Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41

Floating Joint

Reduction of length when using JT and JCM Max. 77 mm Product length Reduction when using JT Overall Length Comparison JT Series New New Size JA + CM2 Series New NewJT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series New NewJT + JCM Series Reduction rate 20 190 g 102

KN Series Nozzles for Blowing

Model Nozzle size D L1 L2 Cassette size H1 Weight (g) L2 M L3 M D KNP-2 0.7 4 5 41 23 4 12.7 987.3 A 1 m polyurethane tube is included. H1 L1 L3 Polyurethane tubing Use to measure workpiece collision pressure.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Fieldbus System

Nil No End Plate Power supply with M12 connector (Max. supplied current 2 A) Power supply with 7/8 inch connector (Max. supplied current 8 A) 2 3 Note) Without SI Unit, the symbol is nil. 41 For Series EX600 Series VQC2000 How to Order Valves VQC 1 0 5 1 0 2 Series VQC2000 Manual override Nil: Non-locking push type (Tool required) Type of actuation 2-position single 4-position dual 3-port

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

m 20 m 0 1 2 4 5 None Nil IN left IN right Differential pressure indicator Construction/Connection L Differential pressure indication switch Note) Note) The paper elements for water-glycol or emulsion is 10 m only. 40 42 Element upward removal Element upward removal Differential pressure indicator Threaded Differential pressure indication switch Note) Element Note) N.C. and N.O. common 41

Fluoropolymer Tubing Variations

Fittings KF series Stainless Steel 316 Insert Fittings KFG series Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ series H/DL L/LL Applicable fittings Note 2) Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) KC 20C 100C 200C 260C 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75 41