IDG

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

Title not found

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

PSxx-OMR0001CN

0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

Digital Gap Checker

With bracket *5 *8 *9: Under the New Measurement Act, sales of digital gap checkers with the unit selection function have not been allowed for use in Japan. *10: Unit: kPa B 6 One-touch fitting *2 *7: Order DIN rail separately.

Digital Gap Checker

(B) Within the acceptable range (Seats correctly).

ISA2

Direct operation poppet Air, Inert gas 2.0 Al HNBR 20 to 60 10 to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

0.01

Example) AR20-02E-1-B-X2175 Under the New Measurement Law, this type is only sold outside Japan. (The SI unit is used inside Japan.)

LEC-OM02704CN

[0][0]0) OFFONCC-Link 14 39 14 14.5.9 (1) 0()5( 6) (a) [3][3][1][0][1][5]14.4.1 (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][3][2][0][2][5] 14.4.1 (b) 10 16 10 01F5501 (3) [8][2][2][0] [8][2] [2][0] 1EA5 14 40 14 14.5.10 (1) (a) [0][2][0][0] [0][2] [0][0] (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][5][8][0][8][E] 14.4.1 (b) 0 0 32bit 16 () 0 10 1 16 0 11 22

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

JXCx-OMT0061CN

1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield

JXCx-OMT0028CN

(0 ) (1-048) RESET B () (-)(+) W 1W 2 (W 12 0 ) (1-049) RESET PARA B (1-050) RESET B No. ( PLC ) No. (1-051) RESET No.

HRX-OM-W069

output signal 3 B contact (normally closed) By default 2.4.2 Contact output signal 4 to 6 Contact output signal 4 to 6 can be set to "signal type", "contact form".

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

JXCx-OMT0034CN

JXC-OMT0034CN (GW)(CC-Link) / LEC-GMJ2 1. . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2). 8 (3)(LEC) . 8 (4). 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGMJ2) . 13 (2)DIN (LECGMJ2D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (STATION NO.,B RATE) . 15 4.2 (CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC

Secondary Batteries

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.