Pneumatic Purification

(N10), 3/4 NPT (N06) Model NAD402-N04 (N04 = 1/2 NPT) Minimum operating pressure 22psi. Maximum operating pressure 145psi.

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: NPT, Port Size: 3/4, Accessory: None, Option 1: None, Option 2: Y+Z

Table of Contents

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

V100

10 units.

VQ7-6/7-8

Exhaust center : VQ7-6-FJG-D Pressure center : VQ7-6-FIG-D 50 50 68.5 76.5 145 86.5 155 50 50 68.5 13 (port B) 13 (port A) 13 (port B) 13 (port A) Manual override Manual override B A B A B B 38 50 62 38 50 62 Indicator light R1 P R2 R1 R2 Indicator light 2-6.5 Mounting hole 2-6.5 Mounting hole 42.5 42.5 42.5 42.5 G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 125.5 137.5 125.5 137.5 37 93

VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

VFR

Symbol 02 2 stations A, B P , EA, EB Symbol 04 06 Passage Porting specifications (A, B) EA, EB P 10 10 stations 1 2 Symbol 3 4 3 4 1 Side 2 Bottom M Mixed Common Common For bottom ported: 1/2 only.

VQZ1000/2000/3000

8 One-touch fitting for 10 M5 thread Rc 1/4 C3 C4 C6 C8 C10 M5 02 Type of actuation 2 position single (B) 2 (A) 4 1 5 (R1) 1 (P) 3 (R2) 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Note) For inch size and One-touch fittings, refer to page 2-7-27. 2 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) Metal seal Rubber seal Manual override 3 position closed center (A) 4 (B) 2 Nil: Non-locking push type (

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal IP65 Option (Y, YZ only) W Standard IP65 rated Manual override B Non-locking push type (Tool type) Slotted locking type (Tool type) Electrical entry Light and surge voltage suppressor Electrical entry Symbol Grommet (DC specification) Without G L LO M MO Y YO YZ YOS L type plug connector with lead wire L type plug terminal without connector Function Standard type (1.0W) High

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

VP300/500/700

B mount single base Common EXH, Individual EXH Common SUP Max. 20 stations Note) Manifold base type R (EXH) type P(SUP) type Max. number of stations Note) In the case of more than 10 stations, use 2 SUP/EXH ports to supply/exhaust pressure. Model Applicable valve model Manifold base model no.

V

A M E T E R S 20, 25, 32 Model A B C D E F G H I Y ZPR10D 10 12 15 24 32.9 49 60 83 94 6 ZPR16D 16 18 16 25 33.9 50 61 84 95 7 A P P L I C A B L E T U B E Applicable Tube O.D.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

A

size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4

Soft Start-up Valve AV2000/3000/4000/5000

A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7

Soft Start-up Valve AV2000/3000/4000/5000 1

1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42 36 3 M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5 (Double) 130