Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRB2 10 W B 180 S E Without auto switch Connecting port location Size 10 15 Nil E Side ported Axial ported 90 L CDRB2 10 W F 180 S Axial ported Side ported With auto switch Size: 10, 15 CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

: 10, 15, 20, 30, 40 How to Order CRB2 10 WU B 180 S Without auto swithch Size 10 15 20 30 40 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size 10 15 With auto switch Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73

Electric Actuator/Slider Type

Horizontal Vertical 30 60 Regeneration (50%) Lead 8: LEFS32 B 25 50 Work load [kg] Work load [kg] 20 40 Regeneration (100%) Lead 8: LEFS32 B Lead 16: LEFS32 A 15 30 Regeneration (100%) 20 10 Lead 16: LEFS32 A 5 10 0 0 0 200 400 600 800 1000 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 0 5 10 15 20 25 30 35 40 70 Lead 10: LEFS40 B Regeneration

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Table of Contents

M5 01 02 M5 1/8 (6A) 1/4 (8A) 10 10 stations Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (For manifold) VDW 2 3 5 2 G Coil insulation type Material and insulation type Series Body material Seal material NBR FKM NBR FKM FKM Symbol Nil A G H L 1 2 3 10 20 30 C37 Class B Stainless steeel Note) Valve type Note) For pure water: The armature

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

CRB2/CRBU2/CRB1

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRB2 10 W B 180 S E Standard Connecting port position Size 10 15 Nil E Side ports Axial ports 90 L CDRB2 10 W F 180 S Side ports Axial ports With auto switch Sizes: 10, 15 CDRB2 20 W B 180 S R73 L With auto switch Sizes: 20, 30, 40 Fittings are sold separately.

1

Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120 6 59 30 124 30 110 30 30 50 120 160 6 75 34 156 34 140

Battery-less

C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M

Table of Contents

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 LX LY LZ X Y Double Clevis Style 63 95 91.5 113 16.2 9 Bore size Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Without auto switch With auto switch A 88 98 109.5 119.5 132 142 CD CL CT CU CW CX CZ L (mm) B 36 46 43.5 53.5 53 63 A B 80 118 114 140 19.5 11 63 98 46 14 84 8 20 30 22 44 8 100 137 136

Table of Contents

(7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 16 (17) (16) (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) ZPT25 ZPT32 28 (26) 30 (25) (23) 28 (26) 30 (25) (16) 28 (26) 30 (25) (23) 30 (29) 32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27

High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

Rotary Actuator/Vane Type

Set range of Block C = 135 (195) Single flat Point zero CRB2 CRB2 Set range of Block C Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) Set range of Block D Max. 115 (Size: 10, 40) Max. 120 (Size: 15, 20, 30) End r End w CRB1 End e Set range of Block D = 90 MSU End w End q Single flat CRJ End q (45) A port B port A port B port CRA1 B port A port B port A port Clockwise

ZP

A r Buffer stroke t Vacuum inlet y Width across flats M Connection thread S 10 91 57 23 20 129 67 51 30 139 77 40 175 87 77 50 185 97 E D C B 10 13 46 29.9 21 04 06 P 10 8 M5 x 2.5 10 91.5 57.5 0.8 23 20 129.5 67.5 51 30 139.5 77.5 40 175.5 87.5 77 50 185.5 97.5 Applicable tubing O.D.

LJ1H

S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Table of Contents

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specifications Bracket mounting size Accessory specifications (mm) With pressure gauge With auto-drain Model Port size D C A B H 27 33 N 26 63 66 76 76 P F 25 30 41 50 50 G 20 24 35 40 40 K 4.5 5.5 7 9 9

Table of Contents

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50