Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

REA/REB

Model selected 10-2-66 66 Series REBR Model Selection 2 Caution on Design 1 Selection Method RE A B 25 32 15 REC 500 400 300 200 300 CX 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 CY 40 30 40 50 20 30 40 50 30 MQQ M 20 20 Usable range 10 RHC 10 10 Usable

REA/REB

REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide

SYJ300/500/700

port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23

Table of Contents

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

VQZ1000/2000/3000

part number consists of 10 units.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

1

Model Port size Control method With One-touch fitting Stainless steel specifications (Stainless steel 300) 15-10-5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

72 89 110 5 5.5 5.5 6 7 7 10 10 6 8 10 14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 20 25 32 40 50 63 80 100 201 to 350 301 to 400 301 to 450 301 to 800 301 to 1200 301 to 1200 301 to 1400 301 to 1500 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 M12 x 1.75 depth 22 For mounting brackets, refer to

CL

CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5 70 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 Stroke range to 300 to 300 to 300 to 300 GB 0.033 0 E CXW 1/8 1/8 1/8 1/8 20 25 32 40 20 26 26 32 0.039 0 0.033 0 0.033 0 8 8 CXS 8 100.5 11 CXT P Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 I 28 33.5 37.5 46.5 K 5 5.5 5.5 7 L 30 30 30 39 MM M8

JXCx-OMU0004

5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700 40 700 8 45 800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

holes) 2.5 (Mounting holes) 2.5 A 11 A 17.5 11 17.5 44.9 300 48.9 [50.2] 58.5 (Lead wire length) (Lead wire length) 300 52.6 [59.1] 41.5 [48] 41.5 [48] 33.5 28.5 33.5 28.5 22.5 29.1 R P 22.5 R P 13 13 5 5 10 8.6 3-M5 X 0.8 10 8.6 3-M5 X 0.8 (Piping port) 23 (Piping port) 23 [ ] for AC Other dimensions are the same as the grommet

CV/MVGQ

8 13 65.3 5 30 24 Up to 300 13 9 5 28 M8 x 1.25 15 20 0 0.033 13 45 30 Up to 300 22 19.5 17 9 10 10 6 33.5 70.5 5.5 M10 x 1.25 15 30 26 0 0.033 -X Up to 300 22 19.5 9 10 12 13 45 37.5 76.5 5.5 30 15 34.5 17 6 M10 x 1.25 26 0 0.033 21 14 16 50 7 39 Up to 300 24 22 10 15 8 46.5 84.5 M14 x 1.5 21.5 42.5 32 0 0.039 20ZZ S U Z NN Q QY RR Bore size (mm) Data 20 25 32 40 133 142 19.8 14 9 62 14

CV/MVGQ

65.3 18 24 9 28 Up to 300 15 13 5 M8 x 1.25 20 0 0.033 45 13 30 10 5.5 19.5 10 70.5 22 30 9 33.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 -X 45 13 30 12 5.5 19.5 10 76.5 22 34.5 9 37.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 50 16 39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 Data 142 133 14 62 9 14 19.8 M20 x

CM2

20 33.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 137 146 30 15 30 9 14 22 30 62 9 10 10 13 25 8 45 26 34.5 37.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 139 148 30 15 9 14 22 30 64 9 10 12 13 32 8 45 26 21 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1 to 300 22 8 177 188 39 11 18 24 38 88 10 15 14 16 40 11 50 32 With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 51 to 100 1 to 50 51 to 100

Slider Type Ball Screw Drive/11-LEFS Series

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000

TABLE OF CONTENTS

Abrasion Resistance Excellent Excellent Excellent Good Age Resistance Excellent Good Excellent Excellent Steam Resistance Fail Fail Fail Good (to 300 F.) Low Temp Range -40 to -65 F. +10 to -10 F. -40 to -65 F. -40 to -60 F. High Temp. Cont. +230 to +240 F. +325 to + 350 F. +230 to +240 F. +250 to +300 F. Duty High Temp.