MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

Compact

] 500 500 500 500 400 400 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work

Air Cylinder

12 2 35 5 26 5 6 M8 x 1.25 24 69 (77) 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300

MY1

L unit 1000 1000 Air cushion Adjusting bolt 500 400 300 500 400 300 0.5 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 Shock absorber m2, m3max m1max m2max m3max m1max 2.

Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

REA/REB

Model selected 10-2-66 66 Series REBR Model Selection 2 Caution on Design 1 Selection Method RE A B 25 32 15 REC 500 400 300 200 300 CX 200 Allowable driving force Fn (N) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 CY 40 30 40 50 20 30 40 50 30 MQQ M 20 20 Usable range 10 RHC 10 10 Usable

REA/REB

REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide

SYJ300/500/700

port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23

Table of Contents

VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

VQZ1000/2000/3000

part number consists of 10 units.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

1

Model Port size Control method With One-touch fitting Stainless steel specifications (Stainless steel 300) 15-10-5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

72 89 110 5 5.5 5.5 6 7 7 10 10 6 8 10 14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 20 25 32 40 50 63 80 100 201 to 350 301 to 400 301 to 450 301 to 800 301 to 1200 301 to 1200 301 to 1400 301 to 1500 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 M12 x 1.75 depth 22 For mounting brackets, refer to

CL

CX 10 10 10 15 D 8 10 12 14 F 13 13 13 16 GA 73.5 83.5 83.5 90.5 GC 8 9 9 8 GD 55 64.5 64.5 70 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 Stroke range to 300 to 300 to 300 to 300 GB 0.033 0 E CXW 1/8 1/8 1/8 1/8 20 25 32 40 20 26 26 32 0.039 0 0.033 0 0.033 0 8 8 CXS 8 100.5 11 CXT P Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 I 28 33.5 37.5 46.5 K 5 5.5 5.5 7 L 30 30 30 39 MM M8

JXCx-OMU0004

5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15 200 15 200 3 20 300 20 300 20 300 20 300 4 25 400 25 400 25 400 25 400 5 30 500 30 500 30 500 30 500 6 35 600 35 600 35 600 35 600 7 40 700 40 700 40 700 40 700 8 45 800 45 800 45 800 45 800 9 50 900 50 900 50 900 50 900 10 55 1000 55 1000 55 1000 55 1000 11 60 1200 60 1200 60 1200 60 1200 12 65 1400 65 1400 70 1400 70 1400 13 70