Hydraulic

11 11 40 88 109 21 M10 x 1.25 37 136 30 11 25 to 800 0.13 0.18 40 65 45 12 42 3/8 11 11 11 46 95 118 21 M10 x 1.25 36 136 30 11 25 to 800 0.2 50 76 52 15 46 1/2 14 13 11 58 115 145 27 M10 x 1.25 43 150 30 13 25 to 800 0.15 63 90 63 15 52 1/2 18 15 14 65 132 165 27 M12 x 1.5 43 156 35 15 25 to 800 0.2 80 110 80 17 65 3/4 18 18 16 87 155 190 22 M16 x 1.5 44 166 35 18 25 to 1000 0.3 0.18 100

Compact Cylinder

9 67 76 89 M 77 89 71 9 9 80 92 108 95 131 25, 50 123.5 103.5 111 FT L 4 x FD B + Stroke 80 11 11 99 116 134 FX 75, 100 136 116 116 136 25, 50 135 113 120.5 142.5 FZ A + Stroke 100 11 11 117 136 154 75, 100 147.5 125.5 125.5 147.5 Rod end male thread Standard stroke Bore size (mm) L L1 M 32 40 50 63 80 100 17 38.5 34 17 38.5 40 10, 15, 20, 25 50, 75, 100 18 43.5 50 18 43.5 60 Rod end nut

ZP

ZPT25 25 1.8 ZPT32 19.5 45.5 14.5 24.5 40.5 4.5 35 2.3 32 1 10 11 ZPT10UT 13 14 ZPT13UT 1.5 16 17 ZPT16UT 10 11 ZPT10CT 0.8 13 14 ZPT13CT 1 16 17 ZPT16CT 3 19 7 4 20 8 2.5 Deep H: M6 x 1 H: M8 x 1 Y Model A B C E F G I C E F G I D ZPT25D 25 28 20 3 25 25 51 8 3.5 30 15 46 12 10 Elliptic Model a ZPT2004U 4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y

Table of Contents

) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

NCQ2/CQ2

131 111 123.5 103.5 25, 50 FT L 4 x FD 11 11 99 116 134 80 FX 116 136 116 75, 100 136 B + Stroke A + Stroke 120.5 135 113 25, 50 142.5 FZ 100 117 136 154 11 11 125.5 147.5 125.5 75, 100 147.5 Rod end male thread Standard stroke Bore size (mm) L L1 M 32 40 50 63 80 100 17 38.5 34 Warranty and Operating Instructions 17 38.5 40 10, 15, 20, 25 50, 75, 100 18 43.5 50 18 43.5 60 Rod end nut L1

Table of Contents

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

MY1

11 99 99 25 25 13 (Max. 33) 13 (Max. 38) 128 152 RB2725 RB2725 9 9.5 7.7 9 11.5 12 20 24 29 35 5 10 12 14 17 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB1007 RB1412 RB2015 RB2015 58 70 88 104 32 38 50 57 5 4.5 6 4 14 17 22 22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 7 12 15 15 MY1C25 MY1C32 MY1C40 16 22 22 66 82 95 6 8 8 52 67 78 MY1C50 MY1C63 40 52 20 26 66 77 18.5 19 8 8 8-11-64 62

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

CL

11 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 8 0 0 0 0 14 18 18 22 26 20 21 23 23 25 71 80 99 117 131 45 50 60 70 80 11 11 14 17 17 M10 X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X

AC Servo Motor Driver (Pulse input type/Positioning type ）

are used (Total number of turns: 4) 11 25 11.

Table of Contents

(inch) Applicable fitting size d (inch) M Min. port size Note) Weight (g) D1 D2 L1 L2 A Model Applicable tubing KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5

Made to Order

94 9 11 11 14 depth 10.5 1/4 3/8 3/8 15 16 23 84 104 19 25 25 17.5 depth 13.5 -X -X 17.5 depth 13.5 123.5 Note 1) The external dimensions with rubber bumper are same as those of the standard, as shown above.

Table of Contents

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27

AC Servo Motor Driver (Network card type ）

Number of gear teeth on machine side: 25, number of gear teeth on servo motor side: 11 Set [Pr. PA06] = 25 and [Pr. PA07] = 11. Machine Servo motor Z2 Z1 Pt (Servo motor resolution): 4194304 pulses/rev Z1: Number of gear teeth on servo motor side Z2: Number of gear teeth on machine side Z1: Z2 = 11:25 5 101 5. PARAMETERS 5.4.2 Electronic gear setting in the indexer method Adjust [Pr.

Smooth Cylinder/Low Speed Cylinder

4.5 5.5 19.5 3.5 7.5 16 20 25 0 [2] 4.5 0 19 6 4 6 2 2 4 6 6 21.5 4 8 3.5 [1.5] 1 3.5 22.5 10 7.5 2.5 6 6 7.5 10 10 25 7.5 4.5 [3.5] 1 5.5 5.5 24.5 11 9.5 0.5 7 7 9.5 1.5 0 32 11 11 27 9.5 2.5 [ ]: Denotes the values of D-A96.

Electric Actuator

Vertical 30 60 Regeneration (50%) Lead 8: 11-LEFS32;B 25 50 Work load [kg] Work load [kg] 20 40 Regeneration (100%) Lead 8: 11-LEFS32;B Lead 16: 11-LEFS32;A 15 30 Regeneration (100%) 20 10 Lead 16: 11-LEFS32;A 5 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 Speed [mm/s] Speed [mm/s] 11-LEFS40/Ball Screw Drive Horizontal Vertical 0 5 10 15 20 25 30 35 40 70 Lead 10: 11-LEFS40;

Air Slide Table

Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12A-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12A-100Z 36

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

11 11 11 21 21 24 24 24 24 33.5 38.5 45 50 22 26 24 25 15 19 19 19 25 29 29.5 28.5 15 21 21 21 MO 63, 80, 100 Cylinder tube form 80 100 45 48 45.5 49 62 71.5 76.5 86 30 30 23 23 40 HN 40 Bore size (mm) Rod end male thread Standard stroke L1 H1 C1 X 32 40 50 63 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 20.5 20.5 26 26 23.5 23.5 28.5 28.5 28.5 28.5 33.5 33.5 H1 10, 15, 20, 25 50, 75, 100 25,

Combination Cylinder

25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA L MM N P RR S U W H 51 58 58 71 72 110 110 120 Z 234 261 280 327 356 ZZ 244 273 296

1

32 40 50 63 80 100 Bore size (mm) 12 16 20 25 32 40 50 63 80 100 C A B (Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30