Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Environment

S1 U T2 T2 U [mm] Size S1 T2 U 63 84 142 4 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 504 Electric Actuator/Rod Type LEY Series AC Servo Motor Dust-tight/Water-jet-proof (IP65 Equivalent) * Select options Dimensions: In-line Motor LEY63D Encoder Z-phase detecting position 41 LEF Rod

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Option) JXC-MA1 Page 606-11 VUSB cable (Option) JXC-MA1-2 Cable length: 3 m Page 606-11 VController setting software (Option) JXC-MA1-1 Page 606-11 PC Provided by customer 559-0 A System Construction/Parallel I/O (JXC73/83) Provided by customer. The connected actuators should be ordered separately. Provided by customer.

Electric Actuators

SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

CEx-OMQ0011

P16 S1 S1 S1 S1 S2 S2 S2 S2 ... ... ... ... S32 S32 S32 S32 0.5mm) 1 2 2. 3.

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

CEx-OMQ0013

P16 s1 s1 s1 s1 s2 s2 s2 s2 ... ... ... ... s32 s32 s32 s32 0.5mm) 1 2 , 2. 30mm 30mm 3.

Proposals for Energy Saving

depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35 35 43 59 10.5 15 16 23 Note 1) Dimensions other than above are the same as the standard double acting single rod type.

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Electric Actuator with Integrated Guide

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

XM, XY

x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 200mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m)