Thermo-con/Rack Mount Type

1600 1600 Ambient temperature 15C 1400 1400 Cooling capacity [W] Cooling capacity [W] 1200 1200 Ambient temperature 25C Ambient temperature 25C 1000 1000 800 800 600 600 400 400 Ambient temperature 35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

33

1) C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

LEKF-OMZ0035

1200 B 6 8 10 *Refet to Applicable Stroke Table.

NCA1

3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4

Air Cylinder NCA1 Series

7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

CLS

(Up to 1200) 180 Up to 1500 (Up to 2000) Up to 1200 (Up to 1200) 200 Up to 998 (Up to 2000) Up to 998 (Up to 1200) Holding Force of Spring Locking (Maximum static load) 250 (Up to 2400) (Up to 1200) Auto switches are not available with steel tube.

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

0.5

1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

IDG

(Refer to page 14-19-11.)

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

MY1

) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

Series IDG

Ratio of purge air flow rate to inlet air flow rate under standard performance conditions Outlet air flow rate: Value under standard performance conditions Table of Contents Single Style Standard Dew Point 20C (4F) specificationsPage 1 Standard Dew Point 15C (5F) specifications ..Page 5 Standard Dew Point 40C (40F) specifications ..Page 9 Standard Dew Point 60C (76F) specifications ..Page 11