11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm

Specification: Clean Series, Vacuum Type, Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: -, Function: -, Switch Rail: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

1

3 8 12 15 4 11 10 4 6 7 XT34 14 7 5 Note) Cannot be used for movable wiring.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I G 25 27 28 FY FZ 3 3 5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 0 0.030 0 0.030 0 0.030 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 4 5 5 5h9 6h9 6h9 2 2.5 3 11 13 14.5 VA 2H9 2H9 3H9 SC TB 5 6 6 RB 16 18 22

Table of Contents

5 D-X 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 20Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Data CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance