High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

Auto Switch Guide

Grommet Tie-rod Terminal conduit 9-15-36 D-G39C/K39C D-M9N/M9P/M9B 9-15-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 9-15-39 Direct Grommet D-Y59A/Y59B/Y7P 9-15-38 D-Y69A/Y69B /Y7PV D-Y7G/7H 9-15-40 D-M5N/M5P/M5B 9-15-41 D-H7NW/H7PW/H7BW 9-15-42 Band Grommet D-G59W/G5PW/K59W 9-15-43 2-color indication D-F79W/F7PW/J79W 9-15-44 Solid State Switch Rail Grommet D-F7NWV/F7BWV 9-15-45 D-F59W/F5PW

Rotary Table/Rack & Pinion Style Series MSQ

Nil S n Reed switch Auto switch A90 Solid state switch M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision style B Basic style 2 pcs. 1 pc. n pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-9-10 11 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7 How to Order CRB2 CRBU2 MSQA A M9B 1 High precision type CRB1 MSQB A M9B 1 Basic type MSU Number of auto

Compact Cylinder Series CQS

Model Cushion Auto switch mounting Bore size (mm) 12 16 20 25 12 16 20 25 Standard stroke (mm) Port size Lubrication Action Model Rubber Air 10-CQSXB12 10-CQSXB16 10-CQSXB20 10-CQSXB25 11-CQSXB12 11-CQSXB16 11-CQSXB20 11-CQSXB25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Non-lube Double acting single rod M5 x 0.8 5, 10, 15, 20, 25, 30 5, 10

Parallel Style Air Gripper Series MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch model L L L Finger position D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL Air gripper model 11 13 3.5 6.5 4 11 13 5 7 5 3 8 6 5 3.5 5 3.5 No setting 9 11 1.5 4.5 2 9 11 3 5 3 1 6 4 3 1.5 3 1.5 13 15 5.5 8.5 3 6 4 13 15

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

MY1

FH a EC EY E EA EB EC EY F FH h S T TT FB FC Shock absorber model a FW W Applicable bore size MY1M20 5 50 57.5 73 87 115 138.5 46.7 67.3 73.2 73.2 58 70 88 104 7 12 15 15 14 17 22 22 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB1007 RB1412 RB2015 RB2015 5 4.5 6 4 3.5 4.5 5.5 5.5 11 11 20 24 29 35 10 12 14 17 32 38 50 57 7.7 9 11.5 12 18.5 19 MY1M25 MY1M32 MY1M40 6 8 8 66 82 95 52 67

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5

Mini Free Mount Cylinder

Standard Stroke Unit: N Bore size (mm) Action Standard stroke (mm) Stroke (mm) Bore size (mm) Spring condition 12 5 10 5, 10, 15, 20 25, 30 16 6 3.5 Pre-loaded Double acting 12 9.5 9.5 Loaded 5, 10, 15, 20, 25 30, 35, 40, 45, 50 20 4.5 Pre-loaded 7.5 16 12 Loaded 11 11 Single acting, spring return 5, 10 16 10.5 5.5 Pre-loaded 20 20 16.5 16.5 Loaded Moving the load with the thrust (spring

Mechanically Jointed Rodless Cylinder Series MY1

FB FC Shock absorber model a Applicable bore size FW W E EA EB EC EY F FH h S T TT MY1C20 7.7 32 10 5 20 50 5 5 (Max. 11) RB1007 58 14 7 46.7 3.5 MY1C25 9 38 12 4.5 24 57.5 5 (Max. 16.5) RB1412 70 6 66 17 52 12 67.3 4.5 16 MY1C32 11.5 50 14 6 29 73 8 (Max. 20) RB2015 88 8 82 22 67 15 73.2 5.5 22 MY1C40 12 57 17 4 35 87 9 (Max. 25) RB2015 104 8 95 22 78 15 73.2 5.5 22 MY1C50 8 115 30 11 99

Rotary Clamp Cylinders

20 6.6 8 14 G1/4 34 76.5 10.5 Rc1/4 0.15 0.15 M8 x 1.25 112 M12 x 1.75 11 depth 8 NPT1/4 0.1 0.2 0 0.062 60 7 7.5 17 103 19 3.5 48 77 15 20 9 35 9 18 G1/4 80 35 10.5 Rc1/4 0.15 0.15 M10 x 1.5 115 M12 x 1.75 14 depth 10.5 NPT1/4 Note 1) Above figures are for the D-M9, M9W, M9A, A9.

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Electric Actuator

Cable length (L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 15 20 Actuator side Controller side (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)